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US4600836A Diaphragm deflection sensor for fused silica diaphragm module 失效
用于石英隔膜模块的隔膜偏转传感器

Diaphragm deflection sensor for fused silica diaphragm module
摘要:
A high temperature pressure transducer and sensing apparatus to determine the deflection of the transducer diaphragm is disclosed. The pressure transducer utilizes a fused silica diaphragm (12) which is illuminated at selected locations by a coherent laser source (52) via optical fibers (38, 46). The light reflected by the diaphragm (12) forms interference fringe patterns which are focused by gradient index rod lenses (36) on the ends of optical fibers (40, 48) for transmission to a fringe counting circuit (54). By digital techniques, the fringe count is converted into a determination of diaphragm deflection.
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