发明授权
- 专利标题: Diaphragm deflection sensor for fused silica diaphragm module
- 专利标题(中): 用于石英隔膜模块的隔膜偏转传感器
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申请号: US596481申请日: 1984-04-03
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公开(公告)号: US4600836A公开(公告)日: 1986-07-15
- 发明人: John W. Berthold, III , Larry A. Jeffers , Larry B. Thompson
- 申请人: John W. Berthold, III , Larry A. Jeffers , Larry B. Thompson
- 申请人地址: LA New Orleans
- 专利权人: The Babcock & Wilcox Company
- 当前专利权人: The Babcock & Wilcox Company
- 当前专利权人地址: LA New Orleans
- 主分类号: G01B11/16
- IPC分类号: G01B11/16 ; G01L9/00 ; G01D5/34
摘要:
A high temperature pressure transducer and sensing apparatus to determine the deflection of the transducer diaphragm is disclosed. The pressure transducer utilizes a fused silica diaphragm (12) which is illuminated at selected locations by a coherent laser source (52) via optical fibers (38, 46). The light reflected by the diaphragm (12) forms interference fringe patterns which are focused by gradient index rod lenses (36) on the ends of optical fibers (40, 48) for transmission to a fringe counting circuit (54). By digital techniques, the fringe count is converted into a determination of diaphragm deflection.
公开/授权文献
- US3991559A Apparatus for generating high-pressure gas 公开/授权日:1976-11-16