Diaphragm deflection sensor for fused silica diaphragm module
    1.
    发明授权
    Diaphragm deflection sensor for fused silica diaphragm module 失效
    用于石英隔膜模块的隔膜偏转传感器

    公开(公告)号:US4600836A

    公开(公告)日:1986-07-15

    申请号:US596481

    申请日:1984-04-03

    IPC分类号: G01B11/16 G01L9/00 G01D5/34

    CPC分类号: G01L9/0077

    摘要: A high temperature pressure transducer and sensing apparatus to determine the deflection of the transducer diaphragm is disclosed. The pressure transducer utilizes a fused silica diaphragm (12) which is illuminated at selected locations by a coherent laser source (52) via optical fibers (38, 46). The light reflected by the diaphragm (12) forms interference fringe patterns which are focused by gradient index rod lenses (36) on the ends of optical fibers (40, 48) for transmission to a fringe counting circuit (54). By digital techniques, the fringe count is converted into a determination of diaphragm deflection.

    摘要翻译: 公开了一种用于确定换能器隔膜的偏转的高温压力传感器和感测装置。 压力传感器利用熔凝石英膜(12),其通过光纤(38,46)通过相干激光源(52)在选定位置被照射。 由隔膜(12)反射的光形成由光纤(40,48)的端部上的渐变折射率棒透镜(36)聚焦的干涉条纹图案,以传输到边缘计数电路(54)。 通过数字技术,边缘计数被转换成膜片偏转的确定。