发明授权
US4608549A Hydrogen-selective sensor and manufacturing method therefor 失效
氢选择传感器及其制造方法

Hydrogen-selective sensor and manufacturing method therefor
摘要:
A hydrogen-selective gas sensor comprising a gas-sensing element including a semiconductor in a principal portion thereof, and a thin coat or layer inactive for oxidation of hydrogen formed over an entire surface of the gas-sensing element or at least on a surface of the semiconductor. The thin layer comprises one of silicon oxide, aluminum oxide, and silicon nitride, and is formed on the surface of the semiconductor by chemical deposition, the thin layer checking passage of molecules other than hydrogen molecules.
公开/授权文献
信息查询
0/0