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US4613404A Materials which exhibit a surface active effect with vacuum baked photoresists and method of using the same 失效
使用真空烘烤光刻胶表现出表面活性效果的材料及其使用方法

Materials which exhibit a surface active effect with vacuum baked
photoresists and method of using the same
Abstract:
A process for manufacturing a thin film magnetic head, the improvement wherein a metal, alloy or mixture thereof which improves the surface characteristics of a vacuum baked photoresist is deposited on the vacuum baked photoresist to thereby improve adhesion of a subsequently deposited layer.
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