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公开(公告)号：US06884317B2
公开(公告)日：2005-04-26
申请号：US09771673
申请日：2001-01-29
IPC分类号： H01L21/302 , H01L21/00 , H01L21/311 , B44C1/22 , C03C15/00 , C03C25/06
CPC分类号： H01L21/67069 , H01L21/31116
摘要： Method for etching a substrate wherein, after placing in an etching chamber, said substrate is treated with a mixture of HF and acetic acid. Acetic acid is introduced into the chamber first, followed by the hydrogen fluoride. Hydrogen fluoride is introduced via an intermediate stage during which the hydrogen fluoride is stored in an auxiliary chamber. By this means back-flow of a corrosive mixture consisting of hydrogen fluoride and acetic acid into the piping assembly for hydrogen fluoride is prevented and, thus, the life of the piping assembly concerned is appreciably prolonged and metal contamination on substrate treated later is prevented.
摘要翻译： 蚀刻基板的方法，其中在放置在蚀刻室中后，用HF和乙酸的混合物处理所述基板。 首先将乙酸引入室内，然后加入氟化氢。 通过氟化氢储存在辅助室中的中间阶段引入氟化氢。 通过这种方式，防止由氟化氢和乙酸组成的腐蚀性混合物回流到氟化氢的管道组件中，因此有关管道组件的使用寿命明显延长，并且防止后处理的基板上的金属污染。
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公开(公告)号：US4793896C1
公开(公告)日：2001-10-23
申请号：US15985288
申请日：1988-02-22
发明人： DOUGLAS MONTE A
IPC分类号： C23F1/12 , H01L21/302 , H01L21/3065 , H01L21/311 , H01L21/3213 , H01L21/768 , B44C1/22 , C03C15/00 , C23F1/02 , C03C25/06
CPC分类号： H01L21/31116 , H01L21/32137 , H01L21/76895
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公开(公告)号：US6126844A
公开(公告)日：2000-10-03
申请号：US195275
申请日：1998-11-18
申请人： Gregory Hirsch
发明人： Gregory Hirsch
CPC分类号： C03C25/68 , C23F1/04 , G02B6/262 , G21K1/06 , G02B2006/12195
摘要： A glass or metal wire is precisely etched to form the paraboloidal or ellipsoidal shape of the final desired capillary optic. This shape is created by carefully controlling the withdrawal speed of the wire from an etchant bath. In the case of a complete ellipsoidal capillary, the etching operation is performed twice in opposite directions on adjacent wire segments. The etched wire undergoes a subsequent operation to create an extremely smooth surface. This surface is coated with a layer of material which is selected to maximize the reflectivity of the radiation. This reflective surface may be a single layer for wideband reflectivity, or a multilayer coating for optimizing the reflectivity in a narrower wavelength interval. The coated wire is built up with a reinforcing layer, typically by a plating operation. The initial wire is removed by either an etching procedure or mechanical force. Prior to removing the wire, the capillary is typically bonded to a support substrate. One option for attaching the wire to the substrate produces a monolithic structure by essentially burying it under a layer of plating which covers both the wire and the substrate. The capillary optic is used for efficiently collecting and redirecting the divergent radiation from a source which could be the anode of an x-ray tube, a plasma source, the fluorescent radiation from an electron microprobe, or some other source of radiation.
摘要翻译： 精确地蚀刻玻璃或金属丝以形成最终期望的毛细管光学器件的抛物面或椭圆形形状。 这种形状是通过仔细地控制来自蚀刻剂浴的丝线的提取速度而产生的。 在完全椭圆形毛细管的情况下，相邻线段上的相反方向进行两次蚀刻操作。 蚀刻的线经历后续操作以产生非常光滑的表面。 该表面涂覆有一层材料，其被选择为使辐射的反射率最大化。 该反射表面可以是用于宽带反射率的单层或用于在较窄波长间隔内优化反射率的多层涂层。 涂层线材通常通过电镀操作而由增强层构成。 初始线通过蚀刻程序或机械力去除。 在除去电线之前，毛细管通常结合到支撑衬底上。 将导线附接到基板的一个选择通过将其基本上埋在覆盖电线和基板的电镀层下面而产生整体结构。 毛细管光学器件用于有效地收集和重定向来自源的发散辐射，该源可以是X射线管的阳极，等离子体源，来自电子微探针的荧光辐射或其它一些辐射源。
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公开(公告)号：US6086775A
公开(公告)日：2000-07-11
申请号：US41608
申请日：1998-03-13
CPC分类号： C03C25/1065 , C03C25/68 , C03C25/70 , G02B6/245
摘要： A method for preparing coated optical fibers wherein an outer coating is a colored ink coating, and an inner coating is a protective coating, which removes the ink coating while minimizing damage to the protective coating. The method includes uimersing the fiber in a dilute acid bath at a predetermined length of time, removing the fiber from the bath and neutralizing the acid thereon, wiping the remnant ink coating off, and removing the protective coating.
摘要翻译： 一种制备涂覆光纤的方法，其中外涂层是彩色油墨涂层，内涂层是保护涂层，其除去油墨涂层，同时最小化对保护涂层的损伤。 该方法包括将纤维在预定时间的稀酸浴中漂白，从浴中除去纤维并中和其上的酸，擦去残留的油墨涂层，并除去保护涂层。
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公开(公告)号：US5928527A
公开(公告)日：1999-07-27
申请号：US632254
申请日：1996-04-15
申请人： Kin Li , Minas Tanielian
发明人： Kin Li , Minas Tanielian
CPC分类号： C03C23/006 , C03C23/0065 , C03C25/6293 , H05K3/288
摘要： A method for producing stable atmospheric pressure glow discharge plasmas using RF excitation and the use of said plasmas for modifying the surface layer of materials. The plasma generated by this process and its surface modification capability depend on the type of gases used and their chemical reactivity. These plasmas can be used for a variety of applications, including etching of organic material from the surface layer of inorganic substrates, as an environmentally benign alternative to industrial cleaning operations which currently employ solvents and degreasers, as a method of stripping paint from surfaces, for the surface modification of composites prior to adhesive bonding operations, for use as a localized etcher of electronic boards and assemblies and in microelectronic fabrication, and for the sterilization of tools used in medical applications.
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公开(公告)号：US5928525A
公开(公告)日：1999-07-27
申请号：US95352
申请日：1998-06-09
CPC分类号： G02B6/4203 , B82Y20/00 , B82Y35/00 , G01Q60/22 , G02B6/245 , G02B6/241 , Y10S977/862 , Y10S977/878
摘要： An optical fiber made up of a core for propagating the light and a clad covering the core for confining the light propagated in the core. The optical fiber has a tapering protrusion at the apex for entrance and exiting of light. The optical fiber is used in a photon scanning tunneling microscope detecting the evanescent light localized in an area smaller in size than the wavelength of light on the surface of an sample as an optical probe disposed in proximity to the surface of the sample for scattering the evanescent light for detecting the scattered light. The optical fiber is optically coupled to an optical waveguide for constituting an optically coupled element. With this optically coupled element, a protrusion of the optical fiber operates as a collection unit for collecting the light propagated in the core. The light collected by the protrusion enters the optical waveguide.
摘要翻译： 由用于传播光的芯构成的光纤和覆盖芯的包层以限制在芯中传播的光。 光纤在顶点处具有锥形突起，用于入射和离开光。 该光纤用于光子扫描隧道显微镜，其检测位于比样品表面上的光的波长小的区域中的ev逝光，作为设置在样品表面附近的光学探针，用于散射ev逝 用于检测散射光的光。 光纤光学耦合到光波导，用于构成光耦合元件。 利用该光耦合元件，光纤的突起作为用于收集在芯中传播的光的收集单元。 由突起收集的光进入光波导。
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7.发明授权Using ceramic wafer to protect susceptor during cleaning of a processing chamber 失效在清洁处理室时使用陶瓷晶片来保护基座
公开(公告)号：US5810937A
公开(公告)日：1998-09-22
申请号：US614594
申请日：1996-03-13
IPC分类号： H01L21/683 , B08B7/00 , C23C16/44 , H01J37/32 , H01L21/205 , B08B3/12 , B08B7/02 , B44C1/22 , C03C25/06
CPC分类号： H01J37/32862 , B08B7/0035 , C23C16/4405
摘要： A method and apparatus for protecting a susceptor during a cleaning operation by loading a ceramic wafer onto the susceptor before introducing the cleaning agent into the chamber is provided. In particular, the ceramic wafer is chosen to have a dielectric value sufficient to alter the electromagnetic field of a plasma to spread the plasma away from the susceptor during a cleaning operation, directing more of the plasma towards the walls of the chamber.
摘要翻译： 提供一种用于在清洁操作期间通过在将清洁剂引入室内之前将陶瓷晶片装载到基座上来保护感受器的方法和装置。 特别地，陶瓷晶片被选择为具有足以改变等离子体的电磁场的介电值，以在清洁操作期间将等离子体远离基座传播，从而将更多的等离子体引导到腔室的壁。
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公开(公告)号：US5800666A
公开(公告)日：1998-09-01
申请号：US726609
申请日：1996-10-07
CPC分类号： G02B6/25 , G02B6/245 , G02B6/4203
摘要： A method and system for forming microlens (78) on an optical fiber (60) include optical fiber lensing device (10) having lowering mechanism (18) for inserting optical fiber (60) at a predetermined and controlled speed to a predetermined depth in oil-acid bath having oil layer (62), acid layer (64), and boundary (68) between oil layer (62) and acid layer (64). The next step is to etch optical fiber (60) at boundary (68) by forming meniscus (66) around optical fiber (60) to selectively and controllably form on optical fiber (60) a microlens (78) having a predetermined shape, preferably a hyperbolic shape. The etching includes the steps of first tapering optical fiber (60) to a shape determined by the distance that optical fiber (60) is first inserted into acid layer (64). The etch step further chemically mills microlens (78) on optical fiber (60) to the predetermined shape by controlling the etch time and position of optical fiber (60) relative to boundary (68) for etching optical fiber (60) at boundary (68).
摘要翻译： 一种用于在光纤（60）上形成微透镜（78）的方法和系统包括具有用于以预定和控制的速度将光纤（60）插入油中预定深度的下降机构（18）的光纤透镜装置（10） - 含油层（62），酸层（64）和油层（62）与酸层（64）之间的边界（68）的酸浴。 下一步是通过在光纤（60）周围形成弯液面（66）来在边界（68）处蚀刻光纤（60），以选择性地和可控地在光纤（60）上形成具有预定形状的微透镜（78） 双曲形。 蚀刻包括以下步骤：首先使光纤（60）逐渐变细，使之成为由光纤（60）首先插入酸层（64）的距离所确定的形状。 蚀刻步骤通过控制光纤（60）相对于边界（68）的蚀刻时间和位置来蚀刻光纤（60）边界（68），进一步化学研磨光纤（60）上的微透镜（78）至预定形状 ）。
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公开(公告)号：US5795830A
公开(公告)日：1998-08-18
申请号：US686481
申请日：1996-07-26
申请人： John E. Cronin , Carter W. Kaanta
发明人： John E. Cronin , Carter W. Kaanta
IPC分类号： H01L21/033 , H01L21/3065 , C03C25/06
CPC分类号： H01L21/0338 , H01L21/0334
摘要： A method of forming sub-lithographic elements and spaces therebetween where the pitch may be reduced with continuously adjustable line and space dimensions, and a structure resulting from the method, are disclosed. A plurality of spaced convertible members are formed on a substrate. A portion of each member is then converted, thereby reducing the dimensions of the unconverted portion of the member while increasing the width of the member plus its converted layer. A conformal layer of material is then deposited over the converted members, followed by directional etching of the conformal layer. The unconverted portion of the member is then removed. The line and space dimensions can be continuously adjusted by altering either or both of the member's converted layer and conformal layer.
摘要翻译： 公开了一种在其间形成次光刻元件和间隔的方法，其中间距可以通过连续可调的线和空间尺寸减小，并且由该方法得到的结构。 在基板上形成多个间隔开的可转换构件。 然后将每个构件的一部分转换，从而减小构件的未转换部分的尺寸，同时增加构件加上其转换层的宽度。 然后将保形层材料沉积在转换的部件上，然后定向蚀刻保形层。 然后移除该成员的未转换部分。 可以通过改变成员的转换层和保形层中的一个或两个来连续地调整线和空间尺寸。
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公开(公告)号：US5772903A
公开(公告)日：1998-06-30
申请号：US721871
申请日：1996-09-27
申请人： Gregory Hirsch
发明人： Gregory Hirsch
摘要： A metal or glass wire is etched with great precision into a very narrowly tapering cone which has the shape of the desired final capillary-optics bore. By controlling the rate of removal of the wire from an etchant bath, a carefully controlled taper is produced. A sensor measures the diameter of the wire as it leaves the surface of the etchant. This signal is used for feedback control of the withdrawal speed. The etched wire undergoes a treatment to produce an extremely low surface-roughness. The etched and smoothed wire is coated with the material of choice for optimizing the reflectivity of the radiation being focused. This could be a vacuum evaporation, sputtering, CVD or aqueous chemical process. The coated wire is either electroplated, built up with electroless plating, or encapsulated in a polymer cylinder such as epoxy to increase the diameter of the wire for easier handling and greater robustness. During this process, the wire is vertically oriented and tensioned to assure that the wire is absolutely straight. The coated and electroformed wire is bonded to a flat, rigid substrate and is then periodically segmented by cutting or etching a series of narrow slits or grooves into the wire. The wire is vertically oriented and tensioned during the bonding process to assure that it is straight. The original wire material is then chemically etched away through the slits or otherwise withdrawn to leave the hollow internal bore of the final tapered-capillary optical element.
摘要翻译： 将金属或玻璃丝以很高的精度蚀刻成具有所需最终毛细孔孔的形状的非常窄的锥形锥体。 通过控制从蚀刻剂浴中除去丝线的速率，产生精心控制的锥度。 传感器测量线材离开蚀刻剂表面时的直径。 该信号用于提取速度的反馈控制。 经蚀刻的线经过处理以产生极低的表面粗糙度。 蚀刻和平滑的线材涂覆有选择的材料，以优化被聚焦的辐射的反射率。 这可以是真空蒸发，溅射，CVD或水性化学过程。 涂覆的电线是电镀的，用无电解电镀构建，或者封装在诸如环氧树脂的聚合物圆筒中以增加电线的直径以便于处理和更强的鲁棒性。 在此过程中，导线垂直取向和张紧，以确保导线绝对直线。 涂覆和电铸线被粘合到平坦的刚性基底上，然后通过将一系列狭窄的狭缝或凹槽切割或蚀刻到线中来周期性地分割。 导线在接合过程中垂直取向和张紧，以确保其是直的。 然后将原始的线材通过狭缝化学蚀刻掉，或以其他方式取出，留下最终的锥形毛细管光学元件的中空内孔。
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