发明授权
- 专利标题: Method of and apparatus for bonding an electrically conductive wire to bonding pads
- 专利标题(中): 将导电线接合到接合焊盘的方法和装置
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申请号: US677189申请日: 1984-12-03
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公开(公告)号: US4619397A公开(公告)日: 1986-10-28
- 发明人: Peter Urban
- 申请人: Peter Urban
- 专利权人: Peter Urban
- 当前专利权人: Peter Urban
- 优先权: DEX3343738 19831202
- 主分类号: H01L21/607
- IPC分类号: H01L21/607 ; B23K20/10 ; B23K31/02
摘要:
A method and an apparatus for bonding a thin electrically conductive wire, especially an aluminum wire (11), to electrical bonding pads or areas (12, 14) of electric or electronic components (16), especially microchips or semiconductor components. To this end the wire (11) is briefly pressed against the bonding pad (12, 14) by means of an ultrasonically energized bonding wedge (10) and is subsequently severed at a small distance from the side (17) of the wedge (10) that is opposite to the wire feeding side (15) thereof. To prevent the formation of a wire tail (TL) protruding beyond the bonding length (BL), a wire clamping tool (21) is provided on the wire feeding side of the wedge (10) by means of which the wire (11), after having been severed and prior to another bonding operation, is moved back, preferably retracted, at least to such an extent that the free wire end is approximately flush with the side (17) of the wedge (10) which is opposite to the wire feeding side (15 ) thereof.
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