发明授权
- 专利标题： Optical apparatus using polarized light
- 专利标题（中）： 使用偏振光的光学设备
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申请号： US574351申请日： 1984-01-27
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公开(公告)号： US4634240A公开(公告)日： 1987-01-06
- 发明人: Akiyoshi Suzuki , Hideki Ina
- 申请人： Akiyoshi Suzuki , Hideki Ina
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX58-15575 19830202
- 主分类号： H01L21/30
- IPC分类号： H01L21/30 ; G02B27/28 ; G03F9/00 ; G05D3/12 ; H01L21/027 ; H01L21/66 ; G02B7/11
摘要：
An optical apparatus includes an illumination system for illuminating an object with a polarized beam in the desired state of polarization and an imaging system having a polarizing plate adapted to select a desired state of polarization of the beam and a variable magnification zoom erector, the state of polarization of the beam in the illuminating or imaging system being variable in accordance with the change of image magnification in the zoom erector, whereby the quantity of light for observation can effectively be controlled in accordance with the variations of image magnification in the imaging system.
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