发明授权
- 专利标题： Vacuum transfer device
- 专利标题（中）： 真空传送装置
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申请号： US782849申请日： 1985-10-02
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公开(公告)号： US4643627A公开(公告)日： 1987-02-17
- 发明人: Johannes G. Bednorz , Pierre L. Gueret , Hermann E. Nievergelt , Hanspeter Ott , Wolfgang D. Pohl , Daniel F. Widmer
- 申请人： Johannes G. Bednorz , Pierre L. Gueret , Hermann E. Nievergelt , Hanspeter Ott , Wolfgang D. Pohl , Daniel F. Widmer
- 申请人地址： NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： NY Armonk
- 优先权： CHX84112378 19841016
- 主分类号： G01R31/26
- IPC分类号： G01R31/26 ; B25J9/02 ; C23C14/56 ; C23F4/00 ; G12B5/00 ; H01L21/02 ; H01L21/677 ; H01L21/68
摘要：
A vacuum transfer device includes a central processing chamber and a plurality of additional chambers radially positioned around the central chamber and in vacuum-tight connection therewith. A rotatable coulisse arrangement in the central chamber is extendable so as to reach into the additional chambers when correctly aligned. The device can transfer objects among several work stations without intermediate venting and re-evacuation of the system of chambers.
公开/授权文献
- US4143426A Permanently attached artificial limb 公开/授权日：1979-03-13
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