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US4647206A Multi-coordinate measuring machine 失效
多坐标测量机

Multi-coordinate measuring machine
摘要:
The invention contemplates a multi-coordinate measuring machine with interferometric detection of the path of displacement in each of the measurement axes.Each measurement axis is provided with at least one interferometer head which consists of a beam splitter, reference mirror and photoelectric detector. The interferometer heads are supplied by a monomode fiber from a single stationary laser generator.
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