发明授权
- 专利标题: Multi-coordinate measuring machine
- 专利标题(中): 多坐标测量机
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申请号: US651592申请日: 1984-09-18
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公开(公告)号: US4647206A公开(公告)日: 1987-03-03
- 发明人: Horst Kunzmann , Karl Schepperle , Gerhard Trieb
- 申请人: Horst Kunzmann , Karl Schepperle , Gerhard Trieb
- 申请人地址: DEX Oberkochen
- 专利权人: Carl-Zeiss-Stiftung
- 当前专利权人: Carl-Zeiss-Stiftung
- 当前专利权人地址: DEX Oberkochen
- 优先权: DEX3334460 19830923
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01B11/00 ; G01B11/02
摘要:
The invention contemplates a multi-coordinate measuring machine with interferometric detection of the path of displacement in each of the measurement axes.Each measurement axis is provided with at least one interferometer head which consists of a beam splitter, reference mirror and photoelectric detector. The interferometer heads are supplied by a monomode fiber from a single stationary laser generator.
公开/授权文献
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