发明授权
- 专利标题: Vacuum evaporation coating equipment
- 专利标题(中): 真空蒸镀设备
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申请号: US713743申请日: 1985-03-19
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公开(公告)号: US4649860A公开(公告)日: 1987-03-17
- 发明人: Heisaburo Furukawa , Kanji Wake , Yoshio Shimozato , Kenichi Yanagi , Mitsuo Kato , Tetsuyoshi Wada , Norio Tsukiji , Takuya Aiko , Toshiharu Kittaka , Yasuji Nakanishi
- 申请人: Heisaburo Furukawa , Kanji Wake , Yoshio Shimozato , Kenichi Yanagi , Mitsuo Kato , Tetsuyoshi Wada , Norio Tsukiji , Takuya Aiko , Toshiharu Kittaka , Yasuji Nakanishi
- 申请人地址: JPX Tokyo JPX Tokyo
- 专利权人: Mitsubishi Jukogyo Kabushiki Kaisha,Nisshin Steel Co., Ltd.
- 当前专利权人: Mitsubishi Jukogyo Kabushiki Kaisha,Nisshin Steel Co., Ltd.
- 当前专利权人地址: JPX Tokyo JPX Tokyo
- 优先权: JPX59-51141 19840319; JPX59-86169 19840501
- 主分类号: C23C14/26
- IPC分类号: C23C14/26 ; C23C14/56 ; C23C13/08
摘要:
A vacuum evaporation equipment for continuous vacuum evaporation of a metal onto a band or strip of product including at least one vacuum sealing station, provision of ducts that are disposed surrounding the band product and extending from the point of vapor deposition where the band product is subjected to a vacuum evaporation process an a chamber held at a reduced pressure or vacuum state to the extent that substantially no reevaporation of once deposited metal is effectively prevented from occurring. The ducts are adapted to be heated to a temperature substantially higher than the temperature of the steel band product. In addition, there is provided at least one vacuum sealing station with rolls rotatably mounted in the interior of a casing and a complementary sealing bar mounted in a complementary engagement relationship with the rolls having a close gap therebetween. A side panel is mounted self-adjustably in sliding motion in the longitudinal direction along the axes of the rolls on the opposite ends thereof, and heaters are provided to heat the rolls, sealing bar and side panel, respectively.