发明授权
- 专利标题： Contact exposure apparatus
- 专利标题（中）： 接触曝光装置
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申请号： US708783申请日： 1985-03-06
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公开(公告)号： US4651009A公开(公告)日： 1987-03-17
- 发明人: Masao Totsuka
- 申请人： Masao Totsuka
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX59-44827 19840310
- 主分类号： H01L21/027
- IPC分类号： H01L21/027 ; G03B27/20 ; G03F7/20 ; G21K5/10
摘要：
An apparatus wherein a first thin member and a second thin member, the first thin member bearing a pattern, and the second thin member is exposed to the pattern of the first thin member. It includes a vacuum line for discharging a gas existing between the first thin member and the second thin member without close-contact therebetween, and a device for bringing the first and second members into proximity close-contact with each other after said discharging means discharges the gas from between the first thin member and the second thin member.
公开/授权文献
- US5713046A Lens-fitted photographic film unit 公开/授权日：1998-01-27
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