发明授权
- 专利标题: Cryopump with exhaust filter
- 专利标题(中): 冷凝器带排气过滤器
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申请号: US757003申请日: 1985-07-19
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公开(公告)号: US4655046A公开(公告)日: 1987-04-07
- 发明人: Michael J. Eacobacci , David C. Planchard
- 申请人: Michael J. Eacobacci , David C. Planchard
- 申请人地址: MA Waltham
- 专利权人: Helix Technology Corporation
- 当前专利权人: Helix Technology Corporation
- 当前专利权人地址: MA Waltham
- 主分类号: F04B37/08
- IPC分类号: F04B37/08 ; B01D8/00
摘要:
An exhaust port from a cryopump vacuum vessel leads to an exhaust valve. The valve is protected from contamination by a filter standpipe which extends from the exhaust port into the vacuum vessel and which is open at its end opposite to the exhaust port. The standpipe is of porous material which allows the free flow of gas, water, and liquid cryogens therethrough while retaining contaminating debris within the vacuum vessel. The filter conduit is of screen formed into a cylinder. One end is tapered and pressed into the exhaust conduit. The screen cylinder is stopped in the exhaust conduit by a circumferential ridge.
公开/授权文献
- US5888662A Modified electrodes for display devices 公开/授权日:1999-03-30