An improved scanning tunneling microscope comprising a semiconductor chip into which slots are etched to form a central portion linked by a first pair of stripes to an intermediate portion, which in turn is linked by a second pair of stripes to the main body of the chip. The pairs of stripes have mutually orthogonal directions to allow the center portion to perform movements in the x- and y-directions under the control of electrostatic forces created between the stripes and their opposite walls. The center portion has formed into it at least one tongue carrying an integrated, protruding tunnel tip which is capable of being moved in the z-direction by means of electrostatic forces between said tongue and the bottom of a cavity below the tongue.