发明授权
- 专利标题: Movable light source type exposure apparatus
- 专利标题(中): 可移动光源式曝光装置
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申请号: US884516申请日: 1986-07-11
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公开(公告)号: US4682277A公开(公告)日: 1987-07-21
- 发明人: Yoshio Yazaki
- 申请人: Yoshio Yazaki
- 申请人地址: JPX Tokyo
- 专利权人: ORC Manufacturing Co., Ltd.
- 当前专利权人: ORC Manufacturing Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX61-119899 19860524
- 主分类号: G03B27/54
- IPC分类号: G03B27/54 ; G03F7/20 ; G03F9/00 ; H05K3/00 ; F21V7/00
摘要:
A movable light-source type exposure apparatus comprising a light source disposed at the focal point of a parabolic reflector, a first light-shielding member disposed right beneath the light source and intended to prevent the light rays from the light source from being irradiated directly over a mask and a work, a second light-shielding member disposed closely to the mask and work so as to cause the formation of a shadow capable of equalizing the cumulated amounts of light rays at points thereon, a positioning/fixing means intended, for each exposure, to position and fix a retaining frame for the mask and a retaining frame for the work, and a light-source moving means for moving a lamp house having the parabolic reflector, light source, first light-shielding member and second shielding member over the mask and work for purpose of causing the same to be exposed.
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