发明授权
- 专利标题: Flow rate detecting apparatus having semiconductor chips
- 专利标题(中): 具有半导体芯片的流量检测装置
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申请号: US690245申请日: 1985-01-10
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公开(公告)号: US4682496A公开(公告)日: 1987-07-28
- 发明人: Kazuhiko Miura , Tadashi Hattori , Yukio Iwasaki , Tokio Kohama , Kenji Kanehara
- 申请人: Kazuhiko Miura , Tadashi Hattori , Yukio Iwasaki , Tokio Kohama , Kenji Kanehara
- 申请人地址: JPX Nishio
- 专利权人: Nippon Soken, Inc.
- 当前专利权人: Nippon Soken, Inc.
- 当前专利权人地址: JPX Nishio
- 优先权: JPX59-7591 19840118
- 主分类号: G01F1/68
- IPC分类号: G01F1/68 ; G01F1/684 ; G01F1/688 ; G01F1/69 ; G01F1/692 ; G01F1/698 ; G01F1/699 ; G01F15/04
摘要:
A semiconductor type flow rate detecting apparatus having first and second control units arranged at upstream and downstream positions respectively in a flow stream to be measured and an operation circuit. The first control unit includes a first temperature detecting element and a first temperature control heater. The second control unit includes a second temperature detecting element, a second temperature control heater and a preliminary heater. The operation circuit controls the second and preliminary heaters and generates a signal indicative of flow rate. The operation circuit has a constant power consumption circuit to control heat from the preliminary heater to a constant level.
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