发明授权
- 专利标题: GaInAsP/InP distributed feedback laser
- 专利标题(中): GaInAsP / InP分布式反馈激光器
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申请号: US696648申请日: 1985-01-30
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公开(公告)号: US4722092A公开(公告)日: 1988-01-26
- 发明人: Zong-Long Liau , Dale C. Flanders , James N. Walpole
- 申请人: Zong-Long Liau , Dale C. Flanders , James N. Walpole
- 申请人地址: MA Cambridge
- 专利权人: Massachusetts Institute of Technology
- 当前专利权人: Massachusetts Institute of Technology
- 当前专利权人地址: MA Cambridge
- 主分类号: H01S5/042
- IPC分类号: H01S5/042 ; H01S5/12 ; H01S5/187 ; H01S5/227 ; H01L21/208
摘要:
A distributed feedback (DFB) type laser and a method and apparatus for forming same wherein a quaternary semiconductor active lasing strip of material is buried between a substrate of binary compound of one type conductivity material and a mesa binary compound body of opposite type conductivity and a periodic grating structure is etched into the plateau of the mesa. In one embodiment, ohmic contacts are provided on either side of the grating structure and the mesa is undercut adjacent the active strip to partly isolate the ohmic contacts from the homojunction formed when the active strip is buried, preferably using a mass-transport process. In another embodiment, the ohmic contacts are formed on the top of a deeply etched grating structure. A buried layer double heterostructure (DH) laser is also described with DFB grating formed on the side wallsGOVERNMENT SUPPORTThe Government has rights in this invention pursuant to Contract No. F19628-85C-0002, awarded by the Department of the Air Force.
公开/授权文献
- US5863609A Method of processing workpiece with amorphous NI-P 公开/授权日:1999-01-26
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