发明授权
US4722092A GaInAsP/InP distributed feedback laser 失效
GaInAsP / InP分布式反馈激光器

GaInAsP/InP distributed feedback laser
摘要:
A distributed feedback (DFB) type laser and a method and apparatus for forming same wherein a quaternary semiconductor active lasing strip of material is buried between a substrate of binary compound of one type conductivity material and a mesa binary compound body of opposite type conductivity and a periodic grating structure is etched into the plateau of the mesa. In one embodiment, ohmic contacts are provided on either side of the grating structure and the mesa is undercut adjacent the active strip to partly isolate the ohmic contacts from the homojunction formed when the active strip is buried, preferably using a mass-transport process. In another embodiment, the ohmic contacts are formed on the top of a deeply etched grating structure. A buried layer double heterostructure (DH) laser is also described with DFB grating formed on the side wallsGOVERNMENT SUPPORTThe Government has rights in this invention pursuant to Contract No. F19628-85C-0002, awarded by the Department of the Air Force.
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