发明授权
- 专利标题: Optical apparatus for the detection of position
- 专利标题(中): 用于检测位置的光学仪器
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申请号: US911464申请日: 1986-09-25
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公开(公告)号: US4723845A公开(公告)日: 1988-02-09
- 发明人: Hideo Mizutani , Yutaka Suenaga
- 申请人: Hideo Mizutani , Yutaka Suenaga
- 申请人地址: JPX Tokyo
- 专利权人: Nippon Kogaku K. K.
- 当前专利权人: Nippon Kogaku K. K.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX60-217311 19850930
- 主分类号: G02B27/18
- IPC分类号: G02B27/18 ; G02B27/00 ; G03F9/00 ; G01B11/27
摘要:
An optical apparatus for detecting the position of an object by projecting a light image onto the object through a transparent plate and detecting the reflected light from the object through the transparent plate is disclosed. The projection optical system includes a first objective lens for forming the light image. The optical axis of the projection is disposed inclined to the above-said transparent plate. The detection optical system includes a second objective lens for refocusing the light reflected from the object. The optical axis of the reflection light detection between the second object lens and the object is disposed inclined to the transparent plate. The apparatus further comprises plane parallel optical members mounted obliquely so as to cancel the asymmetric aberrations generated by the above-said transparent plate. One of the aberration-correcting plane parallel optical members is interposed in the projection optical path on the side opposite to the transparent plate relative to the first objective lens. The other one is interposed in the detection optical path on the side opposite to the transparent plate relative to the second objective lens.
公开/授权文献
- US5833005A Fog producing fire-fighting system 公开/授权日:1998-11-10
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