发明授权
- 专利标题： Optic element testing method and apparatus
- 专利标题（中）： 光元件测试方法及装置
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申请号： US832972申请日： 1986-02-25
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公开(公告)号： US4725144A公开(公告)日： 1988-02-16
- 发明人: Burke E. Nelson , Marion L. Scott
- 申请人： Burke E. Nelson , Marion L. Scott
- 申请人地址： CA Marina Del Rey
- 专利权人： R & D Associates
- 当前专利权人： R & D Associates
- 当前专利权人地址： CA Marina Del Rey
- 主分类号： G01B9/02
- IPC分类号： G01B9/02 ; G01B11/255 ; G01M11/00
摘要：
A system is described for testing aspheric optic elements by the interference of light beam components that are respectively directed to the element to be tested and to a reference element, which facilitates the testing. A reference element is deformable in a controlled manner to more closely match the element to be tested, to produce straighter and more even fringes.
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