发明授权
- 专利标题: Omega-type electron energy filter
- 专利标题(中): 欧米茄型电子能量过滤器
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申请号: US907040申请日: 1986-09-12
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公开(公告)号: US4740704A公开(公告)日: 1988-04-26
- 发明人: Harald Rose , Stefan Lanio
- 申请人: Harald Rose , Stefan Lanio
- 申请人地址: DEX Heidenheim
- 专利权人: Carl-Zeiss-Stiftung
- 当前专利权人: Carl-Zeiss-Stiftung
- 当前专利权人地址: DEX Heidenheim
- 优先权: DEX3532699 19850913
- 主分类号: H01J37/05
- IPC分类号: H01J37/05 ; H01J37/26 ; H01J49/44 ; H01J3/14 ; G21K1/08
摘要:
The invention is directed to an image forming omega filter having pole pieces with straight edges which has good local resolution and very good energy resolution. The omega filter includes four deflection regions, with deflection angles greater than 90.degree..
公开/授权文献
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