发明授权
US4746792A Optical transducer element and displacement meter comprising such an element 失效
包括这种元件的光学换能器元件和位移计

  • 专利标题: Optical transducer element and displacement meter comprising such an element
  • 专利标题(中): 包括这种元件的光学换能器元件和位移计
  • 申请号: US914050
    申请日: 1986-10-01
  • 公开(公告)号: US4746792A
    公开(公告)日: 1988-05-24
  • 发明人: Jan G. Dil
  • 申请人: Jan G. Dil
  • 申请人地址: NY New York
  • 专利权人: U.S. Philips Corp.
  • 当前专利权人: U.S. Philips Corp.
  • 当前专利权人地址: NY New York
  • 优先权: NLX8502679 19851001
  • 主分类号: G01B11/00
  • IPC分类号: G01B11/00 G01D5/347 G01D5/38 H03M1/30 G01D5/34
Optical transducer element and displacement meter comprising such an
element
摘要:
Displacement of an object is sensed by a transducer element having light first strips and dark second strips alternating in a direction of object displacement. The first strips are formed as phase gratings having grating lines extending in the direction of displacement and having a width equal to half the grating period and a depth such that the zero-order diffraction beam is suppressed. The lines may be grooves or ribs, separated by lands which are at the same level as the second strips. A device, for measuring displacement of an object on which such an element is fixed, includes an imaging system having an aperture limited such that first and higher-order diffraction beams from the phase grating are not transmitted to a radiation-sensitive pattern detection system.
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