公开(公告)号：US4622096A

公开(公告)日：1986-11-11

申请号：US729843

申请日：1985-05-02

申请人： Jan G. Dil ,  Johan W. Bartsen

发明人： Jan G. Dil ,  Johan W. Bartsen

IPC分类号： H01L21/76 ,  H01L21/314 ,  H01L21/316 ,  H01L21/318 ,  H01L21/32 ,  H01L21/762 ,  H01L21/306 ,  B44C1/22 ,  C03C15/00 ,  C03C25/06

CPC分类号： H01L21/3185 ,  H01L21/3145 ,  H01L21/32 ,  H01L21/76221

摘要： The method of the present invention involves the forming of a depression with sidewalls extending below a first oxidation mask provided on a surface of a silicon body. Subsequently, after the sidewalls of the depression have been provided with a second oxidation mask, an oxidation treatment is carried out. According to the invention, the depression is provided in such a manner that the sidewalls of the depression are flat and form an angle of 25.degree. to 45.degree. with the original surface of the silicon body. The second oxidation mask is formed by a 5 to 50 nm thick layer of silicon nitride or silicon oxinitride applied directly or separated from the surface by a layer of silicon oxide having a thickness of less than 5 nm. This leads to a very flat structure.

摘要翻译： 本发明的方法涉及形成具有在硅体表面上设置的第一氧化掩模下方延伸的侧壁的凹陷。 随后，在凹陷的侧壁设置有第二氧化掩模之后，进行氧化处理。 根据本发明，凹陷设置成使得凹陷的侧壁平坦并与硅体的原始表面形成25°至45°的角度。 第二氧化掩模由直径为5至50nm厚的氮化硅或氮氧化硅层形成，或者通过厚度小于5nm的氧化硅层从表面分离。 这导致非常平坦的结构。

公开(公告)号：US4423502A

公开(公告)日：1983-12-27

申请号：US301155

申请日：1981-09-11

申请人： Jan G. Dil

发明人： Jan G. Dil

IPC分类号： G11B7/007 ,  G11B7/013 ,  G11B7/24

CPC分类号： G11B7/24085 ,  G11B7/24 ,  G11B7/24079 ,  G11B7/00745

摘要： A record carrier is disclosed in which information is recorded in an optically readable information structure of track-wise arranged information areas which alternate with intermediate areas. Adjacent information track portions are situated at different, parallel planes spaced from each other by a predetermined distance such as to reduce crosstalk from neighboring tracks thereby permitting the information density to be substantially increased.

摘要翻译： 公开了一种记录载体，其中信息被记录在与中间区域交替的轨道布置信息区域的光学可读信息结构中。 相邻信息轨道部分位于彼此间隔开预定距离的不同平行平面，以减少相邻轨道的串扰，从而允许信息密度显着增加。

公开(公告)号：US4603340A

公开(公告)日：1986-07-29

申请号：US607904

申请日：1984-05-07

申请人： Jan G. Dil

发明人： Jan G. Dil

IPC分类号： H01L21/203 ,  H01L29/15 ,  H01L33/06 ,  H01S5/00 ,  H01S5/343 ,  H01L27/12

CPC分类号： H01L33/06 ,  B82Y20/00 ,  H01L29/155 ,  H01S5/34313 ,  H01S5/3432

摘要： When two indirect only slightly different semiconductor materials having a suitable band gap, for example, AlAs and Al.sub.0.8 Ga.sub.0.2 As, are grown epitaxially one onto the other in layers of a few unit cell layers thick, the electronic band structures are folded so that the indirect minimum of the conduction band is displaced from the edge of the Brillouin zone to the center. The two indirect materials then constitute a superlattice with a band transition with a band gap of 2.2 eV.

摘要翻译： 当具有合适带隙的两个间接仅稍微不同的半导体材料，例如AlAs和Al 0.8 Ga 0.2 As在几个单元电池层的层中外延生长到另一层时，电子带结构被折叠，使得 导带的间接最小值从布里渊区域的边缘偏移到中心。 然后，两种间接材料构成带隙为2.2eV的带状转变的超晶格。

公开(公告)号：US4766307A

公开(公告)日：1988-08-23

申请号：US924230

申请日：1986-10-28

申请人： Marcellinus J. M. Pelgrom ,  Jan G. Dil

发明人： Marcellinus J. M. Pelgrom ,  Jan G. Dil

IPC分类号： H01L27/14 ,  G01D5/26 ,  G01D5/30 ,  G01D5/347 ,  G01D5/36 ,  G01J1/02 ,  H01L31/16 ,  G01D5/34

CPC分类号： G01D5/36 ,  G01D5/26 ,  G01D5/34707

摘要： A photodetector for use in an angular displacement measuring apparatus consists a multiple photocell consisting of radially extending strip-shaped photodiodes (11 to 15). According to the invention, the diodes are connected alternately via switching electrodes (7) to an output electrode (6), which is constituted by a conductive image-defining shield arranged above the switching electrodes and comprises two opposite bands (AB, CD), whose widths (b.sub.1, b.sub.2) are substantially inversely proportional to their radii of curvature in order to reduce trouble by cross-talk. The photodetector may be an integrated circuit, which comprises besides the multiple photocell also a part of the processing circuit. The invention also relates to an apparatus for measuring angular displacements by means of such a photodetector.

摘要翻译： 用于角位移测量装置的光电检测器包括由径向延伸的条状光电二极管（11至15）组成的多个光电管。 根据本发明，二极管经由开关电极（7）交替连接到输出电极（6），该输出电极由布置在开关电极上方的导电图像限定屏蔽构成，并包括两个相反的带（AB，CD）， 其宽度（b1，b2）与其曲率半径成反比，以减少串扰的麻烦。 光电检测器可以是集成电路，除了多个光电池之外，还包括处理电路的一部分。 本发明还涉及一种借助于这种光电检测器测量角位移的装置。

公开(公告)号：US4347441A

公开(公告)日：1982-08-31

申请号：US193972

申请日：1980-10-06

申请人： Jan G. Dil ,  Johannes C. Driessen ,  Wichert Mesman

发明人： Jan G. Dil ,  Johannes C. Driessen ,  Wichert Mesman

IPC分类号： G01B9/02 ,  G01B11/24 ,  G01B11/30 ,  G01B21/20 ,  G01N21/86

CPC分类号： G01B11/303 ,  G01B11/2408 ,  G01B21/20

摘要： An apparatus is described for accurately measuring the profile on an object. The apparatus comprises two probes for simultaneously scanning the object to be measured and the reference object, the objects being rotatable about the same axis. Each of the probes is provided with a reflecting element, which are respectively incorporated in the measuring arm and reference arm of an interferometer.

摘要翻译： 描述了用于精确测量物体上的轮廓的装置。 该装置包括用于同时扫描被测量物体和参考物体的两个探针，物体可绕同一轴线旋转。 每个探针设置有分别结合在干涉仪的测量臂和参考臂中的反射元件。

公开(公告)号：US4230915A

公开(公告)日：1980-10-28

申请号：US972754

申请日：1978-12-26

申请人： Jan G. Dil ,  Bernardus A. J. Jacobs

发明人： Jan G. Dil ,  Bernardus A. J. Jacobs

IPC分类号： G11B7/007 ,  G11B7/12 ,  G11B7/24

CPC分类号： G11B7/007 ,  G11B7/12 ,  G11B7/24

摘要： A record carrier is described having an optically readable radiation-reflecting information structure, which comprises trackwise arranged information areas which, in the track direction and transverse to the track direction, are spaced from each other by intermediate areas. It is demonstrated that if the angle of inclination between the walls of the first areas and the normal to the record carrier has one value between 30.degree. and 65.degree. for a satisfactorily reproducible record carrier, the geometrical distance between the plane of the information areas and the plane of the intermediate areas should have one value between (165/N) nanometers and (270/N) nanometers, N being the refractive index of a transparent medium which is disposed between the first and the second plane.

摘要翻译： 描述了具有光学可读的辐射反射信息结构的记录载体，其包括在轨道方向上并且横向于轨道方向彼此间隔的中间区域的跟踪布置的信息区域。 证明如果令人满意地重现的记录载体，如果第一区域的壁和记录载体的法线之间的倾斜角在30°和65°之间具有一个值，则信息区域的平面与 中间区域的平面应该具有（165 / N）纳米和（270 / N）纳米之间的一个值，N是设置在第一和第二平面之间的透明介质的折射率。

公开(公告)号：US4930116A

公开(公告)日：1990-05-29

申请号：US6613

申请日：1979-01-26

申请人： Jan G. Dil

发明人： Jan G. Dil

IPC分类号： G11B7/007 ,  G11B7/09 ,  G11B7/24

CPC分类号： G11B7/0938 ,  G11B7/007 ,  G11B7/24

摘要： A record carrier is described having an optically readable information structure comprising information areas arranged in information tracks and spaced from each other by intermediate areas. The information areas have a first, comparatively large, phase depth and the intermediate areas have a second, comparatively small, phase depth thereby providing an optimum information signal and an optimal tracking signal during reading.

摘要翻译： 描述了具有光学可读信息结构的记录载体，其包括布置在信息轨道中的信息区域并且通过中间区域彼此间隔开。 信息区域具有第一相对较大的相位深度，并且中间区域具有第二相对较小的相位深度，从而在读取期间提供最佳信息信号和最佳跟踪信号。

公开(公告)号：US4746792A

公开(公告)日：1988-05-24

申请号：US914050

申请日：1986-10-01

申请人： Jan G. Dil

发明人： Jan G. Dil

IPC分类号： G01B11/00 ,  G01D5/347 ,  G01D5/38 ,  H03M1/30 ,  G01D5/34

CPC分类号： G01D5/34715 ,  G01D5/38 ,  H03M1/301

摘要： Displacement of an object is sensed by a transducer element having light first strips and dark second strips alternating in a direction of object displacement. The first strips are formed as phase gratings having grating lines extending in the direction of displacement and having a width equal to half the grating period and a depth such that the zero-order diffraction beam is suppressed. The lines may be grooves or ribs, separated by lands which are at the same level as the second strips. A device, for measuring displacement of an object on which such an element is fixed, includes an imaging system having an aperture limited such that first and higher-order diffraction beams from the phase grating are not transmitted to a radiation-sensitive pattern detection system.

摘要翻译： 物体的位移由具有光的第一条带和暗的第二条带的传感器元件在物体移动的方向上交替地感测。 第一条带形成为具有沿位移方向延伸的光栅线的相位光栅，其宽度等于光栅周期的一半，以及使得零级衍射光束被抑制的深度。 这些线可以是凹槽或肋，由与第二条带处于相同水平面的区域分开。 用于测量其上固定有这种元件的物体的位移的装置包括具有孔限制的成像系统，使得来自相位光栅的第一和更高阶衍射光束不被传送到辐射敏感图案检测系统。

公开(公告)号：US4704347A

公开(公告)日：1987-11-03

申请号：US823864

申请日：1986-01-29

申请人： Franciscus A. Vollenbroek ,  Jan G. Dil ,  Henricus J. J. Kroon ,  Elisabeth J. Spiertz ,  Wilhelmus P. M. Nijssen

发明人： Franciscus A. Vollenbroek ,  Jan G. Dil ,  Henricus J. J. Kroon ,  Elisabeth J. Spiertz ,  Wilhelmus P. M. Nijssen

IPC分类号： G03F7/26 ,  G03F1/00 ,  G03F1/08 ,  G03F7/095 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  G03C5/00

CPC分类号： G03F7/095

摘要： A method of manufacturing a semiconductor device, in which there is applied to a surface of a semiconductor substrate a base layer of photosensitive lacquer, which is coated with a top layer of photosensitive lacquer. By means of a first patterned irradiation, there is formed in the top layer a mask of which a contact copy is formed in the base layer during a second irradiation. A material which can be discolored is used for the top layer. During the first irradiation, the top layer is locally discolored, whereupon the layer thus discolored is used as a mask during the second irradiation. By the use of the discoloring top layer, additional processing steps, which would ensure from a wet development of the top layer, are avoided.

摘要翻译： 一种制造半导体器件的方法，其中在半导体衬底的表面上涂敷感光漆的基层，该基层涂覆有感光漆的顶层。 通过第一图案化照射，在顶层中形成了在第二次照射期间在基底层中形成接触拷贝的掩模。 可以将变色的材料用于顶层。 在第一次照射期间，顶层局部变色，因此在第二次照射期间将因此变色的层用作掩模。 通过使用变色顶层，可以避免从顶层的湿发展确保的附加处理步骤。

公开(公告)号：US4325135A

公开(公告)日：1982-04-13

申请号：US87276

申请日：1979-10-22

申请人： Jan G. Dil ,  Jacobus P. J. Heemskerk

发明人： Jan G. Dil ,  Jacobus P. J. Heemskerk

IPC分类号： G11B7/00 ,  G11B7/005 ,  G11B7/007 ,  G11B7/013 ,  G11B7/09 ,  G11B7/12 ,  G11B7/24

CPC分类号： G11B7/24085 ,  G11B7/007 ,  G11B7/013 ,  G11B7/0901 ,  G11B7/12

摘要： A record carrier is disclosed having an optically readable information structure comprising trackwise arranged information areas, as well as an apparatus for reading said record carrier. By using two mutually perpendicularly polarized beams components for reading and by giving the information areas of adjacent track portions a different geometries such that areas of one geometry can be read in an optimum manner by only one of the beam components and is virtually not observed by the other beam component, the track distance can be reduced without increasing the crosstalk, so that the information content of the record carrier is increased.

摘要翻译： 公开了一种具有光学可读信息结构的记录载体，该信息结构包括跟踪地布置的信息区域，以及用于读取所述记录载体的装置。 通过使用两个相互垂直的偏振光束分量进行读取，并通过给予相邻轨道部分的信息区域不同的几何形状，使得一个几何形状的区域能够以最佳方式仅通过一个光束分量来读取，并且实际上不被观察到 其他波束分量，可以减小轨道距离而不增加串扰，从而增加记录载体的信息内容。