发明授权
- 专利标题: Vapor source for vacuum coating installation
- 专利标题(中): 蒸气源用于真空镀膜安装
-
申请号: US825075申请日: 1986-01-31
-
公开(公告)号: US4748935A公开(公告)日: 1988-06-07
- 发明人: Urs Wegmann
- 申请人: Urs Wegmann
- 申请人地址: CHX Liechtenstein
- 专利权人: Balzers Aktiengesellschaft
- 当前专利权人: Balzers Aktiengesellschaft
- 当前专利权人地址: CHX Liechtenstein
- 优先权: CHX00509/85 19850205
- 主分类号: C23C14/30
- IPC分类号: C23C14/30 ; H01J37/305 ; C23C14/00
摘要:
A vapor source for a vacuum-coating installation comprises a rotatably mounted vaporizing crucible, a drive motor and a device, preferably an electron beam gun, for heating the material to be vaporized, all arranged in one structural unit, movable as a whole in the coating installation. With this, the site of the vaporization for a given layer-thickness distribution can be selected optimally to correspond to the respective applications.
公开/授权文献
信息查询
IPC分类: