发明授权
US4748935A Vapor source for vacuum coating installation 失效
蒸气源用于真空镀膜安装

Vapor source for vacuum coating installation
摘要:
A vapor source for a vacuum-coating installation comprises a rotatably mounted vaporizing crucible, a drive motor and a device, preferably an electron beam gun, for heating the material to be vaporized, all arranged in one structural unit, movable as a whole in the coating installation. With this, the site of the vaporization for a given layer-thickness distribution can be selected optimally to correspond to the respective applications.
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