发明授权
- 专利标题: High time resolution electron microscope
- 专利标题(中): 高分辨率电子显微镜
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申请号: US941434申请日: 1986-12-15
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公开(公告)号: US4764674A公开(公告)日: 1988-08-16
- 发明人: Katsuyuki Kinoshita
- 申请人: Katsuyuki Kinoshita
- 申请人地址: JPX Shizuoka
- 专利权人: Hamamatsu Photonics Kabushiki Kaisha
- 当前专利权人: Hamamatsu Photonics Kabushiki Kaisha
- 当前专利权人地址: JPX Shizuoka
- 主分类号: H01J37/22
- IPC分类号: H01J37/22 ; H01J37/285
摘要:
A high time resolution electron microscope unit comprising a beam source for generating an exciting beam; a microscope for exposing the surface of a specimen to be observed to the exciting beam for emitting electrons from the surface; an image formation device for receiving the emitted electrons and for displaying an image representative of variations in the surface of the specimen; a gate mechanism for controlling the flow of emitted electrons from the specimen toward the image formation device; deflecting plates for deflecting the emitted electrons from the gate mechanism onto the image formation device; and a drive circuit for synchronizing the operation of the gate mechanism, the deflecting coil and the beam source.
公开/授权文献
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