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US4783368A High heat conductive insulated substrate and method of manufacturing the same 失效
高导热绝缘基板及其制造方法

High heat conductive insulated substrate and method of manufacturing the
same
摘要:
An insulated substrate having high thermal conductivity comprising a substrate having a thermal conductivity of not less than 50 W/m.k., and an insulating layer having high thermal conductivity coated on the substrate; and a method of producing the insulated substrate characterized in that an insulating layer is formed on a substrate by applying DC voltage and RF power to the substrate and providing a magnetic field parallel to the surface of the substrate.The insulated substrate has good heat conductivity, thermal resistance and smooth surface, whereby exfoliation can be prevented.
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