发明授权
- 专利标题: Transfer machine in a surface inspection apparatus
- 专利标题(中): 转印机在表面检查装置中
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申请号: US789088申请日: 1985-10-18
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公开(公告)号: US4787800A公开(公告)日: 1988-11-29
- 发明人: Kazuyoshi Sone , Katsuya Okumura , Tomio Nakajima , Kanji Ikegaya
- 申请人: Kazuyoshi Sone , Katsuya Okumura , Tomio Nakajima , Kanji Ikegaya
- 申请人地址: JPX Kawasaki JPX Tokyo
- 专利权人: Toshiba Corporation,Tokyo Kogaku Kikai Kabushiki Kaisha
- 当前专利权人: Toshiba Corporation,Tokyo Kogaku Kikai Kabushiki Kaisha
- 当前专利权人地址: JPX Kawasaki JPX Tokyo
- 优先权: JPX59-218297 19841019
- 主分类号: B65G1/00
- IPC分类号: B65G1/00 ; B07C5/342 ; B65G1/07 ; G01B11/30 ; G01N1/00 ; G01N21/88 ; H01L21/67 ; H01L21/677 ; B65G1/04
摘要:
A surface inspection apparatus is equipped with a transfer machine which includes a first storage unit for storing a plurality of wafers therein, a first transfer portion for receiving the wafers from the first storage unit one by one and transferring them along a horizontal plane, a first receiver moving vertically between a lower position and an upper position for receiving the wafers from the first transfer portion when the first receiver moves from its lower position to its upper position and moving them up and down, a chuck moving to a predetermined position under the wafers received by the first receiver when the first receiver is at or near its upper position and receiving the inspected elements from the first receiver when the first receiver moves from its upper position to its lower position, the chuck holding the wafers in their fixed condition and moving them in a given direction along a horizontal plane while they are inspected, a second receiver moving vertically between a lower position and an upper position for receiving the wafers from the chuck when the second receiver moves from its lower position to its upper position, a second transfer portion for receiving the wafers from the second receiver when the second receiver moves from its upper position to its lower position and transferring them along a horizontal plane, and a second storage unit for receiving the wafers from the second transfer portion and storing them therein.
公开/授权文献
- US5796600A Charge pump circuit for improving a charging speed 公开/授权日:1998-08-18