发明授权
US4789421A Gallium arsenide superlattice crystal grown on silicon substrate and method of growing such crystal 失效
在硅衬底上生长的砷化镓超晶格晶体和生长这种晶体的方法

Gallium arsenide superlattice crystal grown on silicon substrate and
method of growing such crystal
摘要:
A GaAs growth crystal comprises a Si substrate, an intermediate layer formed on the substrate and a GaAs layer grown on the intermediate layer. The intermediate layer includes constituent GaP/GaAsP and GaAsP/GaAs superlattice layers and additionally AlP and AlGaP thin films.
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