发明授权
- 专利标题: Semiconductor optical switch
- 专利标题(中): 半导体光开关
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申请号: US143816申请日: 1988-01-13
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公开(公告)号: US4795225A公开(公告)日: 1989-01-03
- 发明人: Kazuo Sakai , Yuichi Matsushima , Katsuyuki Utaka
- 申请人: Kazuo Sakai , Yuichi Matsushima , Katsuyuki Utaka
- 申请人地址: JPX Tokyo
- 专利权人: Kokusai Denshin Denwa Kabushiki Kaisha
- 当前专利权人: Kokusai Denshin Denwa Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX62-8199 19870119
- 主分类号: G02F1/015
- IPC分类号: G02F1/015 ; G02F1/017 ; G02F1/025 ; G02F1/313
摘要:
An optical switch is disclosed in which a switching section for switching the optical path of an incident light is formed in a region where two semiconductor optical waveguides cross each other. The switching section is composed of n-, i-, p-, i- and n-type semiconductor layers laminated in that order, each i-type layer being formed by a superlattice layer composed of a plurality of semiconductor thin films so that the i-type layer is higher in the effective refractive index and smaller in the effective energy gap than each n-type layer. The impurity concentrations of the n-, i-, p-, i-, and n-type layers and the thicknesses of the i-, p-, and i-type layers are determined so that the i-, p- and i-type layers are depleted in a thermal equilibrium state.