发明授权
- 专利标题: Spectrometer objective for particle beam measuring instruments
- 专利标题(中): 粒子束测量仪的光谱仪物镜
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申请号: US120133申请日: 1987-11-13
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公开(公告)号: US4812651A公开(公告)日: 1989-03-14
- 发明人: Hans-Peter Feuerbaum , Juergen Frosien
- 申请人: Hans-Peter Feuerbaum , Juergen Frosien
- 申请人地址: DEX Berlin and Munich
- 专利权人: Siemens Aktiengesellschaft
- 当前专利权人: Siemens Aktiengesellschaft
- 当前专利权人地址: DEX Berlin and Munich
- 优先权: DEX3638682 19861113
- 主分类号: H01L21/66
- IPC分类号: H01L21/66 ; G01N23/225 ; G01R31/302 ; H01J37/14 ; H01J37/141 ; H01J37/244 ; H01J37/26 ; H01J37/28
摘要:
A spectrometer objective includes a generally asymmetrical objective lens having a short focal length, a deflection system disposed within the objective lens symmetrically relative to an optical axis, and an electrostatic retarding field spectrometer including an electrode arrangement for accelerating the secondary electrons generated on the specimen. The electrode arrangement of the retarding field spectrometer includes an electrode pair for establishing a spherically symmetrical retarding field. The electrode arrangement for extracting and accelerating the secondary particles includes a grid electrode disposed in a region of the lower pole piece of the objective lens and of a planar electrode disposed in the particle beam path immediately above the specimen, wherein the planar electrode is charged with a potential lying between the potential of the specimen and the potential of the grid electrode.
公开/授权文献
- US6034299A Soybean cultivar 941010613896 公开/授权日:2000-03-07
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