发明授权
- 专利标题: Plastic mold decapsuling apparatus
- 专利标题(中): 塑胶模具拆封装置
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申请号: US199708申请日: 1988-05-27
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公开(公告)号: US4826556A公开(公告)日: 1989-05-02
- 发明人: Nobutoshi Kobayashi
- 申请人: Nobutoshi Kobayashi
- 申请人地址: JPX both of JPX both of
- 专利权人: Nippon Scientific Co., Ltd.,Kusumoto Chemicals Co., Ltd.
- 当前专利权人: Nippon Scientific Co., Ltd.,Kusumoto Chemicals Co., Ltd.
- 当前专利权人地址: JPX both of JPX both of
- 优先权: JPX62-149247[U] 19871001
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; B44C1/22 ; B29C37/00 ; C03C15/00 ; C03C25/06
摘要:
A plastic mold decapsuling apparatus for decapsuling a plastic mold by feeding an etchant to the plastic mold comprises an etchant bottle; an etchant tank; a decapsuling plastic mold holder; an etchant feeding pump; and, in particular, a bell-shaped cover cap for shielding a plastic mold to be decapsuled on the mold holder from outside air to maintain pressure of the etchant fed by the etchant feeding pump. Since the plastic mold is shielded, even if the plastic mold is decapsuled, it is possible to maintain the etchant feeding pressure at a constant level without introducing outside air into the etchant recirculating passage, thus permitting a stable decapsuling treatment.
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