发明授权
- 专利标题: Wafer transferring device
- 专利标题(中): 晶圆转移装置
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申请号: US106584申请日: 1987-10-08
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公开(公告)号: US4846623A公开(公告)日: 1989-07-11
- 发明人: Masami Otani , Masami Nishida , Masahiro Himoto , Akio Tsuchiya
- 申请人: Masami Otani , Masami Nishida , Masahiro Himoto , Akio Tsuchiya
- 申请人地址: JPX
- 专利权人: Dainippon Screen Mfg. Co., Ltd.
- 当前专利权人: Dainippon Screen Mfg. Co., Ltd.
- 当前专利权人地址: JPX
- 优先权: JPX61-239891 19861008; JPX61-154748[U]JPX 19861008
- 主分类号: B23Q7/00
- IPC分类号: B23Q7/00 ; B23Q7/16 ; B24B9/06 ; B24B41/00 ; B28D5/00 ; E05B47/00 ; H01L21/677
摘要:
A wafer transferring device for transferring a wafer to be treated from a wafer supply station of a wafer treating apparatus to a wafer holding member, where the wafer is treated, and from the holding member to a wafer discharge station. The device includes a transfer unit for separately supporting untreated and treated wafers at different heights relative to one another. A carrier unit moves horizontally and reciprocates between the supply and discharge stations and toward and away from the holding member integrally with the transfer unit and is adapted to move up and down the transfer unit.
公开/授权文献
- USD435271S Game machine 公开/授权日:2000-12-19