摘要:
A wafer transferring device for transferring a wafer to be treated from a wafer supply station of a wafer treating apparatus to a wafer holding member, where the wafer is treated, and from the holding member to a wafer discharge station. The device includes a transfer unit for separately supporting untreated and treated wafers at different heights relative to one another. A carrier unit moves horizontally and reciprocates between the supply and discharge stations and toward and away from the holding member integrally with the transfer unit and is adapted to move up and down the transfer unit.
摘要:
A robot (12) takes a wafer (3f) out of an indexer (1) and then transports the same to a heat processing part (41). A wafer (3e), which has already introduced in the heat processing part (41) is took out thereof by the robot (5). The wafer (3f) is introduced in the heat processing part (41) after a waiting time (18a) so that an excess heat processing in the heat processing part (41) can be avoided. The wafer (3e) is transported to a processing part (43) and introduced therein by the robot (5). After the robot (5) repeats the similar processings in processing parts (13, 42, 44), it returns to the wafer transferring robot (12) to receive a next wafer. At that time, the robot (5) waits for a predetermined time thereby a cycle time is adjusted. After the waiting, the robot (5) takes out the wafer (3f), which has been introduced in the heat processing part (41), out thereof. Since the cycle time is set in common for different lots, the waiting times (18a, 18b) are set individually for each lot.
摘要:
A connection mechanism connects a first casing and a second casing so as to move between a closed state in which the casings are superimposed on each other and an open state in which the casings are open and spread out. The connection mechanism includes: opening parts formed on a connection side of the first casing and a connection side of the second casing; connection members of which both ends can be advanced into and retreated from the opening parts of the first casing and the opening parts of the second casing; and an advance/retreat ratio stabilization part for stabilizing a ratio of an advance/retreat amount of the connection member into/from the first casing to an advance/retreat amount of the connection member into/from the second casing to a predetermined value.
摘要:
An excessive rotation preventing structure for a rotation supporting mechanism, which has no torque loss while ensuring thinness in a height direction, is provided. A portable terminal is also provided. The excessive rotation preventing structure is provided with a rotation stopping means. At the time of rotating and stopping a cover supported on a main body by a shaft, at the same open position where the cover is normally or reversely turned 180 degrees in a flat plane direction, the rotation stopping means rotates and stops the cover by moving one locking member to a move control position for open positioning when the cover is rotated in an opening direction and the locking members of the main body and the cover are correspondingly locked at an open position corresponding part.
摘要:
A valve operating system of an engine opens and closes a valve by a swing cam being swung by rotation of an operating cam. The operating cam has a cam surface and is rotated by the engine, and the swing cam has a cam surface in sliding contact with the valve and a cam follower in sliding contact with the cam surface of the operating cam. The cam surface of the operating cam and the cam surface of the swing cam are formed so that an acceleration component of the swing cam is larger than that of the operating cam in a positive region of a valve lift acceleration defined as a sum of the acceleration component of the operating cam and the acceleration component of the swing cam.
摘要:
A converging reflector comprises a linear light source having two end points located with a predetermined spacing therebetween, a first reflection surface having a curvature so as to have a focal point at one of the two end points, and a second reflection surface having another curvature so as to have a focal point at the other of the two end points. Accordingly, a light from the linear light source is incident onto the first and second reflection surfaces. Thus, this reflector can project a light as an ideal plane of projection, resulting in improved projection efficiency.
摘要:
A photo-conductive liquid crystal display in which the liquid crystal light valve and the electroluminescence element are disposed integrally with each other. The photo-conductive liquid crystal light valve is arranged such that a pair of transparent electrodes are disposed on the outside of a lamination of a photo-conductive layer and a liquid crystal layer, and an electroluminescence element is disposed on the outside of the transparent electrode which is disposed on the writing side of the device.
摘要:
In an interframe adaptive quantization encoding apparatus to perform efficient encoding of video signals using vector quantization method, analog signals raster-scanned from the left to the right on the screen and from the upper side to the lower side are converted into digital signals, the digital signals per every m picture elements x n lines are made a block and the block data is subjected to mean value separation in a vector quantization encoder thereby input vector is formed, inner product between the input vector and output vector read from a code book ROM is estimated by an inner product operation circuit, and maximum value of the inner product is estimated by a maximum inner product detection circuit and made amplitude coefficient, thereby efficient encoding is performed. The efficient encoding data is transmitted to the transmission path by a transmission data buffer and at the same time threshold value of movement detection in the vector quantization encoding is controlled by a movement detection control circuit, and the encoding data supplied from the vector quantizer is decoded by a vector quantization decoder and the block data is reproduced, thereby the apparatus can be constituted without increasing the circuit scale.
摘要:
A multitrack PCM reproducing apparatus for reproducing PCM signals recorded on a plurality of tracks in a distributed relation, comprises a signal selector circuit sequentially selecting the PCM signals reproduced from the individual tracks, an A/D converter converting the reproduced signals selected by the signal selector circuit into digital signals, a memory circuit storing the digital signals obtained by the A/D conversion, a single digital filter equalizing for each track the waveform of the digital signals stored in the memory circuit, and a signal processor circuit demodulating the PCM signals on the basis of the digital signals processed by the digital filter.