发明授权
- 专利标题: Characteristic test apparatus for electronic device and method for using the same
- 专利标题(中): 电子装置用特征试验装置及其使用方法
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申请号: US212047申请日: 1988-06-24
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公开(公告)号: US4851768A公开(公告)日: 1989-07-25
- 发明人: Masahiro Yoshizawa , Akira Kikuchi , Kou Wada , Minpei Fujinami , Nobuo Shimazu
- 申请人: Masahiro Yoshizawa , Akira Kikuchi , Kou Wada , Minpei Fujinami , Nobuo Shimazu
- 申请人地址: JPX Tokyo
- 专利权人: Nippon Telegraph and Telephone Corporation
- 当前专利权人: Nippon Telegraph and Telephone Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX60-177449 19850812
- 主分类号: H01L21/66
- IPC分类号: H01L21/66 ; G01Q30/02 ; G01Q30/04 ; G01Q90/00 ; G01R31/26 ; G01R31/302 ; G01R31/305 ; G01R31/3183 ; H01J37/28
摘要:
In a characteristic test apparatus for an electronic device, a number of voltage supply beams are radiated onto predetermined irradiation positions of the electronic device placed on a sample table. In addition, a potential measuring beam is radiated onto a number of irradiation positions including the predetermined irradiation positions of the voltage supply beams. A secondary electron signal based on the potential measuring beam is detected to measure a potential. When the irradiation position of the potential measuring beam coincides with that of the voltage supply beam, the voltage supply beam is controlled to adjust a potential at the irradiation position to a set value by controlling, e.g., an acceleration power source for the voltage supply beam. When the irradiation position of the potential measuring beam is different from that of the voltage supply beam, a potential at this position is measured. Then, characteristics of the electronic device are calculated based on the obtained potentials at the respective irradiation positions.
公开/授权文献
- US5427209A Vehicle washing aid 公开/授权日:1995-06-27