发明授权
- 专利标题: Relative displacement control apparatus
- 专利标题(中): 相对位移控制装置
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申请号: US71994申请日: 1987-07-10
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公开(公告)号: US4866271A公开(公告)日: 1989-09-12
- 发明人: Masatoshi Ono , Wataru Mizutani , Hiroshi Murakami , Hiroshi Bando , Shigeru Wakiyama , Fumiki Sakai , Takashi Wakatsuki
- 申请人: Masatoshi Ono , Wataru Mizutani , Hiroshi Murakami , Hiroshi Bando , Shigeru Wakiyama , Fumiki Sakai , Takashi Wakatsuki
- 申请人地址: JPX Tokyo JPX Tokyo
- 专利权人: Agency of Industrial Science and Technology,Seiko Instruments Inc.
- 当前专利权人: Agency of Industrial Science and Technology,Seiko Instruments Inc.
- 当前专利权人地址: JPX Tokyo JPX Tokyo
- 优先权: JPX61-164145 19860711; JPX61-164146 19860711; JPX61-289157 19861204
- 主分类号: G01Q10/06
- IPC分类号: G01Q10/06 ; G01Q10/04 ; G01Q60/16 ; H01J37/20
摘要:
A relative displacement control apparatus provides both coarse and extremely fine precise control over displacements between a sample and a detecting probe as required, e.g. in operations of optical instruments, analyzing instruments and scanning tunneling microscopes. This precise fine displacement is produced through a double-lever-action which is created substantially by means of an arm assembly preferably with a piezoelectric drive for precise displacement control, a support pivotally holding the arm assembly, a rigid arm fixed solidly atop the support and a pointed stop or "foot" fixed in the proximity of the free end of the rigid arm.
公开/授权文献
- US5967234A Method of and device for production of hydrocarbons 公开/授权日:1999-10-19
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