公开(公告)号：US4866271A

公开(公告)日：1989-09-12

申请号：US71994

申请日：1987-07-10

申请人： Masatoshi Ono ,  Wataru Mizutani ,  Hiroshi Murakami ,  Hiroshi Bando ,  Shigeru Wakiyama ,  Fumiki Sakai ,  Takashi Wakatsuki

发明人： Masatoshi Ono ,  Wataru Mizutani ,  Hiroshi Murakami ,  Hiroshi Bando ,  Shigeru Wakiyama ,  Fumiki Sakai ,  Takashi Wakatsuki

IPC分类号： G01Q10/06 ,  G01Q10/04 ,  G01Q60/16 ,  H01J37/20

CPC分类号： G01Q10/04 ,  B82Y35/00 ,  H01J37/20 ,  Y10S977/872

摘要： A relative displacement control apparatus provides both coarse and extremely fine precise control over displacements between a sample and a detecting probe as required, e.g. in operations of optical instruments, analyzing instruments and scanning tunneling microscopes. This precise fine displacement is produced through a double-lever-action which is created substantially by means of an arm assembly preferably with a piezoelectric drive for precise displacement control, a support pivotally holding the arm assembly, a rigid arm fixed solidly atop the support and a pointed stop or "foot" fixed in the proximity of the free end of the rigid arm.

摘要翻译： 相对位移控制装置根据需要提供样品和检测探针之间的位移的粗略和非常精细的精确控制。 在光学仪器，分析仪器和扫描隧道显微镜的操作中。 这种精确的精细位移通过双杠杆动作产生，该双杠杆动作基本上通过臂组件产生，优选地具有用于精确位移控制的压电驱动器，枢轴地保持臂组件的支撑件，固定地固定在支撑件上方的刚性臂 固定在刚性臂的自由端附近的尖头止动块或“脚”。

公开(公告)号：US4921346A

公开(公告)日：1990-05-01

申请号：US246359

申请日：1988-09-19

申请人： Hiroshi Tokumoto ,  Hiroshi Bando ,  Fumiki Sakai ,  Chikara Miyata ,  Shigeru Wakiyama

发明人： Hiroshi Tokumoto ,  Hiroshi Bando ,  Fumiki Sakai ,  Chikara Miyata ,  Shigeru Wakiyama

IPC分类号： G01N21/00 ,  G01B7/34 ,  G01H11/06 ,  G01N21/31 ,  G01N23/00 ,  G01N27/00 ,  G01N29/00 ,  G01Q70/00

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q10/06 ,  G01Q30/02

摘要： The amount of deformations such as expansions or contractions of a substance caused in accordance with irradiation of cyclically interrupted monochromatic light is detected by either the changes in a tunnel current sensitive to the changing distance between a sample surface and a detection probe or the amount of changes in a probe fine feed mechanism keeping the tunnel current constant between a sample surface and a detection probe at all times, so that the absorption spectrum intrinsic to the substance relative to the irradiating optical energy according to its wavelength is measured to examine the optical properties of the substance.

摘要翻译： 通过对样品表面和检测探针之间的变化距离敏感的隧道电流的变化或变化量来检测根据循环中断的单色光的照射引起的物质的膨胀或收缩的变形量 在探针精细进给机构中，始终保持样品表面和检测探针之间的隧道电流恒定，从而测量物质相对于根据其波长的照射光能所固有的吸收光谱，以检查物质的光学性质 物质。

公开(公告)号：US4837435A

公开(公告)日：1989-06-06

申请号：US210810

申请日：1988-06-24

申请人： Toshihiko Sakuhara ,  Fumiki Sakai ,  Tetsuo Uchiyama

发明人： Toshihiko Sakuhara ,  Fumiki Sakai ,  Tetsuo Uchiyama

IPC分类号： G01N23/00 ,  G01B7/34 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/06 ,  G01Q30/04 ,  G01Q60/10 ,  G01Q60/40 ,  H01J37/26 ,  H01J37/28

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q30/04 ,  Y10S977/861 ,  Y10S977/868

摘要： The tunneling scanning microscope which is provided with a light source to irradiate a sample with light, particularly with light having one wavelength. The apparatus is used for the investigation of the surface structure of materials which have very low conductivity but increase their conductivities under light irradiation. In particular, the apparatus selectively provides an atomic image of an element of a compound in response to a selected wavelength.

公开(公告)号：US6094972A

公开(公告)日：2000-08-01

申请号：US123146

申请日：1998-07-27

申请人： Masatoshi Yasutake ,  Akira Inoue ,  Fumiki Sakai ,  Kazutoshi Watanabe ,  Tatsuya Miyatani

发明人： Masatoshi Yasutake ,  Akira Inoue ,  Fumiki Sakai ,  Kazutoshi Watanabe ,  Tatsuya Miyatani

IPC分类号： G01B21/30 ,  G01B5/00 ,  G01B7/34 ,  G01N37/00 ,  G01Q30/04 ,  G01Q60/24 ,  G01Q60/34 ,  G01B5/28

CPC分类号： G01Q10/06 ,  B82Y35/00 ,  G01Q30/04 ,  G01Q60/32 ,  Y10S977/851

摘要： An xy scanning unit produces a scanning signal along an x-direction and a scanning signal along a y-direction, which are determined by a contour of a sample to be monitored, scanning time of the x-direction, and a pixel number of the x-direction, supplied from a CPU. Then, the xy scanning unit outputs these scanning signals along the x-direction and the y-direction to a piezoelectric scanning apparatus. On the other hand, a second oscillator outputs a sine wave signal having a frequency determined by the scanning time of the x-direction and the pixel number of the x-direction to a second piezoelectric plate. A sample/hold circuit holds observation data of a probe at such timing after preselected time has passed since the output of the second oscillator becomes maximum, and then outputs the held observation data to a differential amplifier and a P.I control system. An output signal Q of the P.I control system is applied to a z-fine-moving electrode of the piezoelectric scanning apparatus, and also is converted into a digital signal by an A/D converter. This digital signal is stored into a memory in a sampling manner.

摘要翻译： xy扫描单元产生沿着x方向的扫描信号和沿着y方向的扫描信号，其由待监视的样本的轮廓，x方向的扫描时间和x方向的像素数确定 x方向，由CPU提供。 然后，xy扫描单元将这些扫描信号沿x方向和y方向输出到压电扫描装置。 另一方面，第二振荡器输出具有由x方向的扫描时间和x方向的像素数确定的频率的正弦波信号到第二压电板。 采样/保持电路在从第二振荡器的输出变为最大之后经过预选时间之后的这样的定时保持探测器的观测数据，然后将保持的观测数据输出到差分放大器和P.I控制系统。 P.I控制系统的输出信号Q被施加到压电扫描装置的z-微细电极上，并且还通过A / D转换器转换成数字信号。 该数字信号以采样方式存储到存储器中。