发明授权
- 专利标题： Defect detection using intermodulation signals
- 专利标题（中）： 使用互调信号进行缺陷检测
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申请号： US279482申请日： 1988-12-02
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公开(公告)号： US4868506A公开(公告)日： 1989-09-19
- 发明人: Thomas H. DiStefano , Arthur E. Falls , Arnold Halperin , John D. Mackay
- 申请人： Thomas H. DiStefano , Arthur E. Falls , Arnold Halperin , John D. Mackay
- 申请人地址： NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： NY Armonk
- 主分类号： G01R31/02
- IPC分类号： G01R31/02 ; G01R31/28 ; G01R33/02 ; H01L21/66
摘要：
In order to test conductors on substrates for current constricting defects, such as cracks, narrow conductors, line breaks and intermittent opens, a test signal combining two alternating current signals at different frequencies and direct current offset signal is applied to the conductor. Upon encountering a defect, intermodulation signals are generated and detected. The phase of the detected signal and the phase of a reference signal are compared. The difference between the phase of the two signals is indicative of the presence of a defect in the conductor. The invention has particular application for testing thin conductors.
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