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US4870468A Semiconductor light-emitting device and method of manufacturing the same 失效
半导体发光装置及其制造方法

Semiconductor light-emitting device and method of manufacturing the same
摘要:
An active layer is formed on an n-type InP buffer layer of a substrate. A pair of strip-shaped grooves are formed into the active layer to divide it into a contract portion and side portions. A p-type Inp cladding layer is deposited on the entire surface of the active layer and grooves. The cladding layer is selectively etched to form a mesa portion including the central active portion and expose the buffer layer. An insulating film is coated on the mesa portion and buffer layer, so that a semiconductor light-emitting device is manufactured.
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