发明授权
- 专利标题: Semiconductor light-emitting device and method of manufacturing the same
- 专利标题(中): 半导体发光装置及其制造方法
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申请号: US95114申请日: 1987-09-11
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公开(公告)号: US4870468A公开(公告)日: 1989-09-26
- 发明人: Jun'ichi Kinoshita , Motoyasu Morinaga , Hideto Furuyama , Yuzo Hirayama
- 申请人: Jun'ichi Kinoshita , Motoyasu Morinaga , Hideto Furuyama , Yuzo Hirayama
- 申请人地址: JPX Kawasaki
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JPX Kawasaki
- 优先权: JPX61-213800 19860912; JPX61-215814 19860916; JPX61-231852 19860930
- 主分类号: H01S5/227
- IPC分类号: H01S5/227
摘要:
An active layer is formed on an n-type InP buffer layer of a substrate. A pair of strip-shaped grooves are formed into the active layer to divide it into a contract portion and side portions. A p-type Inp cladding layer is deposited on the entire surface of the active layer and grooves. The cladding layer is selectively etched to form a mesa portion including the central active portion and expose the buffer layer. An insulating film is coated on the mesa portion and buffer layer, so that a semiconductor light-emitting device is manufactured.
公开/授权文献
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