发明授权
- 专利标题： Ultrafine tube and method for its production
- 专利标题（中）： 超细管及其生产方法
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申请号： US196170申请日： 1988-05-17
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公开(公告)号： US4874646A公开(公告)日： 1989-10-17
- 发明人: Yoshikazu Tsujino , Yuuji Hamada , Masakazu Sakata , Takanori Fujii , Yukinori Kuwano
- 申请人： Yoshikazu Tsujino , Yuuji Hamada , Masakazu Sakata , Takanori Fujii , Yukinori Kuwano
- 申请人地址： JPX Moriguchi
- 专利权人： Sanyo Electric Co., Ltd.
- 当前专利权人： Sanyo Electric Co., Ltd.
- 当前专利权人地址： JPX Moriguchi
- 优先权： JPX62-120803 19870518
- 主分类号： C25D7/00
- IPC分类号： C25D7/00 ; B05D3/06 ; B23K26/00 ; B29C49/00 ; B29C49/58 ; B29C67/00 ; B29D23/00 ; G02B6/13 ; G03F7/00 ; G03F7/26 ; H01L21/027 ; H01L23/473
摘要：
An ultrafine tube is produced by a method comprising the steps of applying a highly polymerized material on a substrate to form a resist layer on a surface of said substrate, applying a laser beam to the resist layer under such a condition that said resist layer is melted to form an ultrafine tube between the substrate and resist layer in the predetermined pattern.
公开/授权文献
- US5520521A Hydraulic control device for a viscous fluid pump 公开/授权日：1996-05-28
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