发明授权
- 专利标题: Method of making an electrically programmable integrated circuit containing meltable contact bridges
- 专利标题(中): 制造包含可熔接触桥的电可编程集成电路的方法
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申请号: US312358申请日: 1989-02-15
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公开(公告)号: US4882293A公开(公告)日: 1989-11-21
- 发明人: Jorg Naumann , Thomas Sharnagl , Leo Stroth
- 申请人: Jorg Naumann , Thomas Sharnagl , Leo Stroth
- 申请人地址: TX Dallas
- 专利权人: Texas Instruments Deutschland GmbH
- 当前专利权人: Texas Instruments Deutschland GmbH
- 当前专利权人地址: TX Dallas
- 优先权: DEX3731621 19870919
- 主分类号: H01L21/82
- IPC分类号: H01L21/82 ; H01L21/3205 ; H01L21/768 ; H01L23/52 ; H01L23/525
摘要:
A method is described of making an electrically programmable integrated circuit which comprises meltable contact bridges (22) between selected connecting points. In the method, firstly in a semiconductor substrate (10) by means of diffusion or ion implantation to obtain desired circuit functions a semiconductor structure with zones (12) of different conductivity type is formed. On the surface of the semiconductor structure a first protective layer (14) is formed in which contact windows (18) to the selected connecting points are then formed. On the surface of the first protective layer (14) and in the contact windoews (18) a through conductive layer (20) is made of a material forming the fusible contact bridges (22). Using a plasma etching method the conductive layer (20) is etched away so that only the contact bridges (22) with an associated connecting end (21) and conductor regions leading from the contact bridges (22) to the connecting points in the contact windows (18) remain. On the remaining conductor regions a second protective layer (24) is formed which is then etched away by means of a plasma etching method except for the regions lying over the contact bridges (22). In the region of the contact windows (18) and on the connecting ends (21) of the contact bridges (22) a connecting metallization (26, 28) is then applied.
公开/授权文献
- US5534243A Aqueous oral compositions 公开/授权日:1996-07-09
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