发明授权
- 专利标题: Semiconductor device in which electrodes are formed in a self-aligned manner
- 专利标题(中): 电极以自对准方式形成的半导体器件
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申请号: US937610申请日: 1986-12-03
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公开(公告)号: US4887145A公开(公告)日: 1989-12-12
- 发明人: Katsuyoshi Washio , Tohru Nakamura , Kazuo Nakazato , Masatada Horiuchi , Tetsuya Hayashida
- 申请人: Katsuyoshi Washio , Tohru Nakamura , Kazuo Nakazato , Masatada Horiuchi , Tetsuya Hayashida
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX60-271485 19851204; JPX61-123325 19860530
- 主分类号: H01L21/285
- IPC分类号: H01L21/285 ; H01L21/32 ; H01L21/331 ; H01L29/423 ; H01L29/732 ; H01L29/04
摘要:
A bipolar transistor capable of operating at high speeds. In a bipolar transistor designed for operation at high speeds, a polycrystalline silicon layer used as a base electrode effects is a contact area with respect to the base region which lacks precision or tends to increase. Further, when the transistor is formed in a small size, the ratio of the contact area with respect to the polycrystalline area increases, making it difficult to increase the operation speed. In order to reduce the contact area of the polycrystalline silicon layer, this invention deals with the structure in which the polycrystalline silicon layer is brought into contact with a portion near the edge of the convex semiconductor layer maintaining a small size and a high precision.
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