发明授权
- 专利标题: Method for surface treatment
- 专利标题(中): 表面处理方法
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申请号: US228423申请日: 1988-08-05
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公开(公告)号: US4892759A公开(公告)日: 1990-01-09
- 发明人: Tohru Arai , Hiromasa Takeda , Hiroyuki Kawaura
- 申请人: Tohru Arai , Hiromasa Takeda , Hiroyuki Kawaura
- 专利权人: Tohru Arai,Hiromasa Takeda,Hiroyuki Kawaura
- 当前专利权人: Tohru Arai,Hiromasa Takeda,Hiroyuki Kawaura
- 优先权: JPX62-201330 19870812
- 主分类号: C23C10/28
- IPC分类号: C23C10/28 ; C04B35/56 ; C04B35/58 ; C23C8/06 ; C23C12/02 ; C23C16/32 ; C23C16/34 ; C23C16/36 ; C23C16/442 ; C23C16/448 ; H01G13/00 ; H01G17/00 ; H01L21/56
摘要:
Particles of a layer-forming agent containing at least one element for forming a surface layer of e.g. a carbide on the material to be treated are disposed in a furnace below and/or at the side of the material to be treated. A fluidizing gas is introduced into the furnace below the layer-forming agent for fluidizing a powder of alumina or other refractory material to form a fluidized bed above the layer-forming agent, while the agent is not fluidized. The furnace is heated and a solid halide is supplied into the furnace below the layer-forming agent. The halide is sublimable to produce a gas which activates the element, so that it may combine with a particular element which the material to be treated contains, whereby the surface layer is formed thereon. An apparatus for forming such a surface layer is also provided.
公开/授权文献
- US4362055A Power transmission part testing apparatus 公开/授权日:1982-12-07
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