发明授权
- 专利标题: Suction device
- 专利标题(中): 抽吸装置
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申请号: US293614申请日: 1989-01-05
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公开(公告)号: US4904012A公开(公告)日: 1990-02-27
- 发明人: Masanori Nishiguchi , Takeshi Sekiguchi
- 申请人: Masanori Nishiguchi , Takeshi Sekiguchi
- 申请人地址: JPX Osaka
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JPX Osaka
- 优先权: JPX61-181596 19861126
- 主分类号: B25B11/00
- IPC分类号: B25B11/00 ; H01L21/677 ; H01L21/68 ; H01L21/683 ; B25J15/06
摘要:
Suction device for handling a semiconductor wafer comprises a handling section having a plurality of suction ports opened in the same plane as the surface of the wafer and located within an area smaller than that of the surface of the wafer, a pressure reduction device connected to the suction port, an opening acts to release negative pressure produced by the pressure reduction device when a finger is released therefrom, and a grip integrally coupled to the handling section.