发明授权
- 专利标题： Coating solution for use in the formation of metal oxide film
- 专利标题（中）： 用于形成金属氧化物膜的涂层溶液
-
申请号： US141075申请日： 1988-01-05
-
公开(公告)号： US4908065A公开(公告)日： 1990-03-13
- 发明人: Katsuya Tanitsu , Muneo Nakayama , Yoshimi Sato
- 申请人： Katsuya Tanitsu , Muneo Nakayama , Yoshimi Sato
- 申请人地址： JPX
- 专利权人： Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人： Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址： JPX
- 优先权： JPX62-556 19870107
- 主分类号： C09D1/00
- IPC分类号： C09D1/00 ; C23C18/12 ; G02F1/1333 ; H01L21/316
摘要：
A coating solution for use in the formation of a metal oxide film is described. It is composed of (a) a .beta.-diketone, (b) at least one element or compound selected from the group consisting of elements capable of forming complexes with said .beta.-diketone, salts of the elements and hydrolysates of alkoxides of the elements, and (c) an aprotic polar solvent. As an alternative, it is composed of a metal complex of a .beta.-diketone and an aprotic polar solvent.
公开/授权文献
- US5464091A Protective covers 公开/授权日：1995-11-07
信息查询
IPC分类:
