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US4910561A Method and apparatus for detecting profile error of article surface 失效
用于检测物品表面轮廓误差的方法和装置

Method and apparatus for detecting profile error of article surface
摘要:
An optical non-contact detection of profile errors of a surface or surfaces of an article, such as an industrial product is carried out by a coherent signal bea of light introduced along an imaginary plane and projected onto the surface of the article at a large angle of incidence. The signal beam of light is reflected from the surface toward the same imaginary plane and traveled past optical system toward a photosensitive material on which a separate reference beam of light is projected. A hologram of the surface is formed on the photosensitive material, which is used for an analysis of the profile errors of the surface.
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