发明授权
US4910561A Method and apparatus for detecting profile error of article surface
失效
用于检测物品表面轮廓误差的方法和装置
- 专利标题: Method and apparatus for detecting profile error of article surface
- 专利标题(中): 用于检测物品表面轮廓误差的方法和装置
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申请号: US202609申请日: 1988-06-06
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公开(公告)号: US4910561A公开(公告)日: 1990-03-20
- 发明人: Junpei Tsujiuchi , Toshio Honda , Zenji Wakimoto , Mitsuo Suzuki
- 申请人: Junpei Tsujiuchi , Toshio Honda , Zenji Wakimoto , Mitsuo Suzuki
- 申请人地址: JPX Osaka
- 专利权人: Osaka Seimitsu Kikai Co., Ltd.
- 当前专利权人: Osaka Seimitsu Kikai Co., Ltd.
- 当前专利权人地址: JPX Osaka
- 优先权: JPX62-273492 19871030
- 主分类号: G01B9/021
- IPC分类号: G01B9/021 ; G01B11/24
摘要:
An optical non-contact detection of profile errors of a surface or surfaces of an article, such as an industrial product is carried out by a coherent signal bea of light introduced along an imaginary plane and projected onto the surface of the article at a large angle of incidence. The signal beam of light is reflected from the surface toward the same imaginary plane and traveled past optical system toward a photosensitive material on which a separate reference beam of light is projected. A hologram of the surface is formed on the photosensitive material, which is used for an analysis of the profile errors of the surface.
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