发明授权
- 专利标题: Method for fabricating superconductive film
- 专利标题(中): 制造超导膜的方法
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申请号: US300889申请日: 1989-01-24
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公开(公告)号: US4914080A公开(公告)日: 1990-04-03
- 发明人: Kohta Yoshikawa , Naoki Awaji , Kyung-ho Park , Nagisa Ohsako , Seigen Ri
- 申请人: Kohta Yoshikawa , Naoki Awaji , Kyung-ho Park , Nagisa Ohsako , Seigen Ri
- 申请人地址: JPX Kawasaki
- 专利权人: Fujitsu Limited
- 当前专利权人: Fujitsu Limited
- 当前专利权人地址: JPX Kawasaki
- 优先权: JPX63-014387 19880127; JPX63-140701 19880608
- 主分类号: H01L39/24
- IPC分类号: H01L39/24
摘要:
A method for fabricating a superconductive film composed of a RE.sub.1 Ba.sub.2 Cu.sub.3 O.sub.x compound, or a (Bi.Sr.Ca.Cu.O) compound. In a first embodiment, oxides or carbonates of the component materials, namely Y.sub.2 O.sub.3, BaCO.sub.3, and CuO are mixed in atomic ratios of 1:2:3, according to the chemical formula of RE.sub.1 Ba.sub.2 Cu.sub.3 O.sub.x, and sintered to create a rhombic perovskite structure. The sintered mixture is powdered again, with added powdered amounts of Y.sub.2 O.sub.3 and powdered metallic Cu, and sintered. The sintered product is used as the source for an electron beam evaporator. In a second embodiment the (Bi.Sr.Ca.Cu.O) compound is formed into a sintered pellet which is composed of a mixture of one part of BiO, 3-15 parts of SrCO.sub.3, 4-30 parts of CaCO.sub.3, and 2-5 parts of CuO, in atomic ratios of Bi, Sr, Ca and Cu.
公开/授权文献
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