Film thickness measuring and film forming method
    1.
    发明授权
    Film thickness measuring and film forming method 失效
    薄膜厚度测量和成膜方法

    公开(公告)号:US5740226A

    公开(公告)日:1998-04-14

    申请号:US757622

    申请日:1996-11-27

    CPC分类号: G01N23/203 G01N23/20

    摘要: A film thickness measuring method comprises the steps of measuring reflectances of X-rays on a film, extracting interference oscillations from the measured X-ray reflectances, and Fourier transforming the interference oscillations to compute a film thickness of the film, an average reflectance being given by fitting the measured X-ray reflectances to an analysis formula including a term of a product of a power function of an incident angle, which expresses attenuation of reflectances on a smooth surface of the film and an exponent function which expresses influence of roughness of the surface of the film, and a constant term expressing a background added to the product; the interference oscillations being given by using the measured X-ray reflectances and the average reflectance. The film thickness measuring method can extract interference oscillations of a reflectance curve by a method including arbitrariness and by a simple procedure.

    摘要翻译: 膜厚测量方法包括以下步骤:测量薄膜上的X射线的反射率,从测量的X射线反射率中提取干涉振荡,并傅里叶变换干涉振荡以计算膜的膜厚度,给出平均反射率 通过将所测量的X射线反射率拟合到分析公式中,该分析公式包括表示光滑表面上的反射率的衰减的入射角的幂函数的乘积项和表示膜的粗糙度的影响的指数函数 膜的表面,以及表示添加到产品中的背景的常数项; 通过使用测量的X射线反射率和平均反射率给出干扰振荡。 膜厚测量方法可以通过包括任意性的方法和简单的过程来提取反射曲线的干涉振荡。

    INFORMATION DISPLAY DEVICE
    2.
    发明申请
    INFORMATION DISPLAY DEVICE 审中-公开
    信息显示设备

    公开(公告)号:US20120050269A1

    公开(公告)日:2012-03-01

    申请号:US13196186

    申请日:2011-08-02

    申请人: Naoki AWAJI

    发明人: Naoki AWAJI

    IPC分类号: G06T15/00

    摘要: An information display device includes a storage area configured to store a display information item for displaying a real image on a display device; a focal length setting unit configured to set a second focal length that is different from a first focal length extending from a user to the real image displayed on the display device; a converting unit configured to convert the display information item stored in the storage area into a converted display information item for displaying a virtual image at the second focal length; and a virtual image displaying unit configured to display the virtual image at the second focal length based on the converted display information item.

    摘要翻译: 信息显示装置包括存储区域,被配置为在显示装置上存储用于显示实际图像的显示信息项目; 焦距设定单元,被配置为将与从用户延伸的第一焦距不同的第二焦距设置到显示装置上显示的实际图像; 转换单元,被配置为将存储在存储区域中的显示信息项转换成用于在第二焦距处显示虚拟图像的转换显示信息项; 以及虚拟图像显示单元,被配置为基于所转换的显示信息项目显示第二焦距的虚拟图像。

    Element concentration measuring method and apparatus, and semiconductor
device fabrication method and apparatus
    3.
    发明授权
    Element concentration measuring method and apparatus, and semiconductor device fabrication method and apparatus 失效
    元件浓度测量方法和装置以及半导体器件制造方法和装置

    公开(公告)号:US6040198A

    公开(公告)日:2000-03-21

    申请号:US18852

    申请日:1998-02-04

    IPC分类号: G01N23/20 G01R31/26

    CPC分类号: G01N23/20

    摘要: X-rays are irradiated to a sample to be measured including at least one layer of film formed on a substrate; an interference oscillation curve of the X-rays incident on the sample to be measured is measured; and a concentration of an element adhered on a surface of the sample to be measured and/or segregated in an interface of the film is measured. The interference oscillation curve is fitted to an analysis formula expressing an X-ray reflectance to thereby determining a density of a region of the sample to be measured, where the element is adhered or is segregated, and a concentration of the element is computed based on the density.

    摘要翻译: 将X射线照射到待测量的样品,其包括在基底上形成的至少一层膜; 测量入射到待测样品上的X射线的干涉振荡曲线; 并且测量粘附在要测量的样品的表面上和/或分离在膜的界面中的元素的浓度。 将干扰振荡曲线拟合到表示X射线反射率的分析公式,从而确定要测量的样品的区域的密度,其中元素被粘附或分离,并且基于 密度。

    Method of producing high temperature superconductor Josephson element
    4.
    发明授权
    Method of producing high temperature superconductor Josephson element 失效
    制造高温超导体约瑟夫逊元件的方法

    公开(公告)号:US5034374A

    公开(公告)日:1991-07-23

    申请号:US365154

    申请日:1989-06-12

    IPC分类号: H01L39/24

    摘要: A method of producing a high temperature superconductor Josephson element for an electronic device or a photodetector comprising the steps of: forming a lower ceramic superconductor film on a substrate; forming an upper ceramic superconductor of a different system ceramic from that of the lower ceramic superconductor film on a portion of the lower ceramic superconductor and on the substrate; and forming an insulating layer (tunnel barrier) between the lower and upper ceramic superconductor films by an interdiffusion therebetween.

    摘要翻译: 一种用于电子器件或光电检测器的高温超导体约瑟夫逊元件的制造方法,包括以下步骤:在衬底上形成下陶瓷超导膜; 在所述下陶瓷超导体的一部分和所述基板上形成与所述下陶瓷超导膜的不同系统陶瓷的上陶瓷超导体; 并且通过它们之间的相互扩散在下陶瓷超导体膜和上陶瓷超导体膜之间形成绝缘层(隧道势垒)。

    Method for fabricating superconductive film
    5.
    发明授权
    Method for fabricating superconductive film 失效
    制造超导膜的方法

    公开(公告)号:US4914080A

    公开(公告)日:1990-04-03

    申请号:US300889

    申请日:1989-01-24

    IPC分类号: H01L39/24

    摘要: A method for fabricating a superconductive film composed of a RE.sub.1 Ba.sub.2 Cu.sub.3 O.sub.x compound, or a (Bi.Sr.Ca.Cu.O) compound. In a first embodiment, oxides or carbonates of the component materials, namely Y.sub.2 O.sub.3, BaCO.sub.3, and CuO are mixed in atomic ratios of 1:2:3, according to the chemical formula of RE.sub.1 Ba.sub.2 Cu.sub.3 O.sub.x, and sintered to create a rhombic perovskite structure. The sintered mixture is powdered again, with added powdered amounts of Y.sub.2 O.sub.3 and powdered metallic Cu, and sintered. The sintered product is used as the source for an electron beam evaporator. In a second embodiment the (Bi.Sr.Ca.Cu.O) compound is formed into a sintered pellet which is composed of a mixture of one part of BiO, 3-15 parts of SrCO.sub.3, 4-30 parts of CaCO.sub.3, and 2-5 parts of CuO, in atomic ratios of Bi, Sr, Ca and Cu.