发明授权
US4930895A Encoder for forming interference fringes by re-diffracted lights from an
optical type scale and photoelectrically converting the interference
fringes to thereby detect the displacement of the scale
失效
用于通过来自光学类型刻度的重衍射光形成干涉条纹的编码器,并对干涉条纹进行光电转换,从而检测刻度尺的位移
- 专利标题: Encoder for forming interference fringes by re-diffracted lights from an optical type scale and photoelectrically converting the interference fringes to thereby detect the displacement of the scale
- 专利标题(中): 用于通过来自光学类型刻度的重衍射光形成干涉条纹的编码器,并对干涉条纹进行光电转换,从而检测刻度尺的位移
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申请号: US204727申请日: 1988-06-10
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公开(公告)号: US4930895A公开(公告)日: 1990-06-05
- 发明人: Tetsuharu Nishimura , Masaaki Tsukiji , Satoshi Ishii , Koh Ishizuka
- 申请人: Tetsuharu Nishimura , Masaaki Tsukiji , Satoshi Ishii , Koh Ishizuka
- 申请人地址: JPX Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX62-148207 19870615
- 主分类号: G01B11/00
- IPC分类号: G01B11/00 ; G01D5/38
摘要:
An optical type encoder for projecting a light beam onto an optical type scale having a diffraction grating formed thereon, forming interference fringes by the use of the diffracted light from the scale, and photoelectrically converting such interference fringes to thereby detect the displacement of the scale. The first and second light beams are caused to obliquely enter substantially the same position on the scale from different first and second directions, first and second diffracted light beams emerging perpendicularly from the scale by the light beams being diffracted by the scale are received by a common reflecting element, the first and second diffracted light beams are directed to said position by the reflecting element, and interference fringes formed by diffracted light beams emerging from the scale in the first and second directions by the first and second diffracted light beams being diffracted by the scale are photoelectrically converted.
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