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公开(公告)号：US5021649A
公开(公告)日：1991-06-04
申请号：US496259
申请日：1990-03-20
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： An encoder of this invention radiates a light beam onto an optical scale, in which a reflection film is formed on a surface of a relief type diffraction grating formed on one surface of a light-transmission substrate, from a surface opposite to the formation surface of the diffraction grating, and detects a change in intensity of interference light caused by diffracted light produced by the diffraction grating, thereby measuring a displacement of the optical scale.
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公开(公告)号：US4979826A
公开(公告)日：1990-12-25
申请号：US380038
申请日：1989-07-14
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： A displacement measuring apparatus has an illuminating device for illuminating a diffraction grating with a radiation beam, an optical system for directing first and second diffracted beams created by the diffraction grating with to the diffraction grating, the optical system being provided so that the first and second diffracted beams have a common optical path and travel in opposite directions along the optical path. In addition, a device receives an interference beam formed by first and second re-diffracted beams created by the first and second diffracted beams being diffracted by the diffraction grating, and outputs a signal conforming to the displacement of the diffraction grating relative to the radiation beam.
摘要翻译： 位移测量装置具有用于用辐射束照射衍射光栅的照明装置，用于将由衍射光栅产生的第一和第二衍射光束引导到衍射光栅的光学系统，所述光学系统被设置成使得第一和第二 衍射光束具有公共光路并沿着光路在相反方向上行进。 此外，设备接收由由衍射光栅衍射的第一和第二衍射光束产生的第一和第二重衍射光束形成的干涉光束，并且输出符合衍射光栅相对于辐射束的位移的信号 。
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公开(公告)号：US4829342A
公开(公告)日：1989-05-09
申请号：US880207
申请日：1986-06-30
申请人： Tetsuharu Nishimura
发明人： Tetsuharu Nishimura
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： There is disclosed a moving state detection apparatus comprising optical unit for superposing a light beam of a specific order diffracted by a diffraction grating with a nondiffracted reference light beam; and light-receiving unit for receiving the superposed light beam from the optical means, the light-receiving unit being adapted to detect a change in contrast of interference fringes upon movement of said diffraction grating, and detect a moving state of the diffraction grating.
摘要翻译： 公开了一种移动状态检测装置，包括用于将由衍射光栅衍射的特定级别的光束与非衍射参考光束叠加的光学单元; 以及用于接收来自光学装置的重叠光束的光接收单元，所述光接收单元适于检测在所述衍射光栅移动时的干涉条纹的对比度的变化，并且检测衍射光栅的移动状态。
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公开(公告)号：US4677489A
公开(公告)日：1987-06-30
申请号：US774805
申请日：1985-09-11
申请人： Tetsuharu Nishimura , Hideo Yokota , Masatake Kato
发明人： Tetsuharu Nishimura , Hideo Yokota , Masatake Kato
CPC分类号： H04N5/2354
摘要： An image pickup apparatus including an electrical image sensor, means for detecting the reflection of a light beam incident on the image sensor, and control means for controlling the operation of the image sensor in accordance with the output of the detecting means so that the output signal of the image sensor has always a proper level.
摘要翻译： 一种包括电图像传感器的图像拾取装置，用于检测入射在图像传感器上的光束的反射的装置，以及用于根据检测装置的输出控制图像传感器的操作的控制装置，使得输出信号 的图像传感器始终处于适当的水平。
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公开(公告)号：US5198873A
公开(公告)日：1993-03-30
申请号：US789633
申请日：1991-11-12
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： An interferometer for measuring the displacement of a diffraction grating includes a multi-mode semiconductor laser for generating a laser beam; a device for supplying a predetermined current to the laser so that at least five vertical modes occur in an oscillation spectrum of the laser beam generated by the laser at an intensity ratio of at least 0.05; and an optical system for splitting the laser beam generated by the laser into first and second beams. The optical system also directs the first and second beams to the diffraction grating and effects interference between a first diffracted light beam generated by the diffraction of the first beam at the diffraction grating and a second diffracted light beam generated by the diffraction of the second beam at the diffraction grating to produce an interference light beam. Also provided is a photoelectric convertor for converting the interference light beam into an electrical signal.
摘要翻译： 用于测量衍射光栅位移的干涉仪包括用于产生激光束的多模半导体激光器; 用于向激光器提供预定电流的装置，使得在由激光器产生的激光束的振荡光谱中以至少0.05的强度比发生至少五个垂直模式; 以及用于将由激光器产生的激光束分成第一和第二光束的光学系统。 光学系统还将第一和第二光束引导到衍射光栅，并且在衍射光栅处的第一光束的衍射产生的第一衍射光束和由第二光束的衍射产生的第二衍射光束之间产生干涉 衍射光栅产生干涉光束。 还提供了一种用于将干涉光束转换成电信号的光电转换器。
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6.发明授权
公开(公告)号：US5159192A
公开(公告)日：1992-10-27
申请号：US641891
申请日：1991-01-16
申请人： Tetsuharu Nishimura , Koh Ishizuka
发明人： Tetsuharu Nishimura , Koh Ishizuka
CPC分类号： H03M1/30 , G01D5/34715
摘要： A rotary encoder and a scanning system using the same for detecting rotation of a galvano scanner which comprises a rotary scale coupled to a rotating driver, a scale with slits formed at a non-uniform pitch circumferentially on the rotary scale within a limited rotation angle and detection means for detecting a rotation status by reading the slits.
摘要翻译： 一种旋转编码器和使用该旋转编码器的扫描系统，用于检测电动扫描器的旋转，其包括耦合到旋转驱动器的旋转刻度，具有在受限旋转角度内在旋转刻度上沿圆周非均匀间距形成的狭缝的刻度， 用于通过读取狭缝来检测旋转状态的检测装置。
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公开(公告)号：US5146085A
公开(公告)日：1992-09-08
申请号：US522051
申请日：1990-05-11
申请人： Koh Ishizuka , Tetsuharu Nishimura
发明人： Koh Ishizuka , Tetsuharu Nishimura
摘要： A light beam is incident on a first position on a scale at such an angle that diffracted lights substantially coincide with an incident optical path, and two diffracted lights are directed along a substantially common optical path and are incident on a second position symmetrical with the first position. An interference light formed by rediffracted lights reflected from the second position is detected to thereby detect the displaced state of the scale.
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公开(公告)号：US5066130A
公开(公告)日：1991-11-19
申请号：US347397
申请日：1989-05-04
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： A displacement measuring apparatus comprises a scale relatively displaced to an irradiating beam, a reading head to read the scale by the irradiating beam, and control device to control the apparatus for avoiding substantially the leakage of the irradiating beam out of the apparatus in response to the positional error of the scale and the irradiating beam.
摘要翻译： 位移测量装置包括与照射光束相对位移的标尺，用于通过照射光束读取标尺的读取头以及控制装置，用于控制装置，以便基本上避免照射光束从设备中泄漏出来，以响应于 刻度和照射光束的位置误差。
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公开(公告)号：US5051579A
公开(公告)日：1991-09-24
申请号：US532108
申请日：1990-06-01
IPC分类号： G01D5/38
CPC分类号： G01D5/38
摘要： An encoder for measuring movement of an optical scale by photoelectrically converting light from the optical scale obtained by applying light from a light source to the optical scale, by means of light receiving element, includes detector for detecting a variation in intensity of the light received by the light receiving element and a comparator for comparing a signal from the detector with a predetermined reference signal. Consequently, a predetermined alarm signal is generated on the basis of the result of comparison obtained from the comparator. A measuring system for detecting a moving condition of an object, includes an optical scale connected to the object; a light source for applying light to the optical scale; a first detector for receiving light from the optical scale and for detecting the moving condition of the object; a second detector for detecting a variation in intensity of the light received by the first detector; and a signal forming device for forming a predetermined alarm signal on the basis of an output signal from the second detector.
摘要翻译： 一种编码器，用于通过光电转换由光源将光从光源施加到光刻尺上的光通过光接收元件测量光标的移动，包括用于检测由光接收元件接收的光的强度变化的检测器 光接收元件和用于将来自检测器的信号与预定参考信号进行比较的比较器。 因此，基于从比较器获得的比较结果来生成预定的报警信号。 用于检测物体的移动状态的测量系统包括连接到物体的光学刻度; 用于将光施加到光学刻度的光源; 第一检测器，用于接收来自光刻尺的光并检测物体的移动状态; 第二检测器，用于检测由第一检测器接收的光的强度变化; 以及信号形成装置，用于根据来自第二检测器的输出信号形成预定报警信号。
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10.发明授权
公开(公告)号：US5038491A
公开(公告)日：1991-08-13
申请号：US369862
申请日：1989-06-22
CPC分类号： G01D5/24442 , G01D5/24476 , G01D5/347
摘要： A scale, for measuring the displacement of an object to be examined, has a division and a mark for alignment of the division, and a displacement measuring apparatus, for measuring the displacement of a scale, has a device for reading the division of the scale and a detector for detecting the positional error of the division relative to the direction of the displacement.
摘要翻译： 用于测量待检测物体的位移的刻度具有划分的划分和标记，并且用于测量刻度的位移的位移测量装置具有用于读取刻度的分割的装置 以及用于检测相对于位移方向的分割的位置误差的检测器。
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