发明授权
- 专利标题: Automatic preliminary irradiation apparatus in transmission electron microscope
- 专利标题(中): 透射电子显微镜自动预辐射装置
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申请号: US238141申请日: 1988-08-30
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公开(公告)号: US4939365A公开(公告)日: 1990-07-03
- 发明人: Hiroyuki Kobayashi , Teruo Suzuki , Akio Mori , Sadahiko Okamura , Shoji Kamimura
- 申请人: Hiroyuki Kobayashi , Teruo Suzuki , Akio Mori , Sadahiko Okamura , Shoji Kamimura
- 申请人地址: JPX Tokyo JPX Ibaraki
- 专利权人: Hitachi, Ltd.,Hitachi Instrument Engineering Co., Ltd.
- 当前专利权人: Hitachi, Ltd.,Hitachi Instrument Engineering Co., Ltd.
- 当前专利权人地址: JPX Tokyo JPX Ibaraki
- 优先权: JPX62-217872 19870902
- 主分类号: H01J37/04
- IPC分类号: H01J37/04 ; H01J37/147 ; H01J37/26 ; H01J37/28
摘要:
A transmission electron microscope for irradiating a specimen with an electron beam, wherein the electron beam passed through the specimen is imaged on an imaging screen by a magnifying lens system. The electron microscope includes a deflector for deflecting the electron beam to thereby scan a specimen with the electron beam, and a memory for storing a range within which the specimen is to be preliminarily scanned with the electron beams and the number of scans to be performed. The specimen is preliminarily scanned with the electron beam within the preliminary scan range for the number of times on the basis of the corresponding data read out from the memory.
公开/授权文献
- US6097295A Apparatus for determining the alertness of a driver 公开/授权日:2000-08-01