公开(公告)号：US4939365A

公开(公告)日：1990-07-03

申请号：US238141

申请日：1988-08-30

申请人： Hiroyuki Kobayashi ,  Teruo Suzuki ,  Akio Mori ,  Sadahiko Okamura ,  Shoji Kamimura

发明人： Hiroyuki Kobayashi ,  Teruo Suzuki ,  Akio Mori ,  Sadahiko Okamura ,  Shoji Kamimura

IPC分类号： H01J37/04 ,  H01J37/147 ,  H01J37/26 ,  H01J37/28

CPC分类号： H01J37/265

摘要： A transmission electron microscope for irradiating a specimen with an electron beam, wherein the electron beam passed through the specimen is imaged on an imaging screen by a magnifying lens system. The electron microscope includes a deflector for deflecting the electron beam to thereby scan a specimen with the electron beam, and a memory for storing a range within which the specimen is to be preliminarily scanned with the electron beams and the number of scans to be performed. The specimen is preliminarily scanned with the electron beam within the preliminary scan range for the number of times on the basis of the corresponding data read out from the memory.

摘要翻译： 一种用电子束照射样本的透射电子显微镜，其中通过试样的电子束通过放大镜系统在成像屏上成像。 电子显微镜包括用于使电子束偏转从而用电子束扫描样本的偏转器，以及存储器，用于存储要用电子束预先扫描样本的范围和要执行的扫描次数。 基于从存储器读出的对应数据，将预备扫描范围内的电子束预先扫描次数。