发明授权
- 专利标题: Transmission electron microscope
- 专利标题(中): 透射电子显微镜
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申请号: US343750申请日: 1989-04-27
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公开(公告)号: US4945237A公开(公告)日: 1990-07-31
- 发明人: Kazuo Shii , Toshiyuki Ohashi , Hiroyuki Kobayashi
- 申请人: Kazuo Shii , Toshiyuki Ohashi , Hiroyuki Kobayashi
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX63-106195 19880428
- 主分类号: H01J37/147
- IPC分类号: H01J37/147 ; H01J37/153 ; H01J37/21 ; H01J37/26
摘要:
Provided is an electron microscope having an electron gun emitting an electron beam onto a specimen to be observed, so as to produce transmitted main electron rays, inelastic scattering electron rays and diffractive scattering rays, an objective lens converging the electron rays so as to form an image, an objective aperture for normally cutting off the diffractive scattering electron rays while allowing the transmitted main electron rays and the inelastic scattering electron rays to pass therethrough, a magnifying means for magnifying the image, an observing screen from which the magnified image is visible, a mechanism for deflecting the electron beam emitted from the electron gun before the specimen, and a means for controlling the mechanism to deflect the electron beam to a large deflecting angle so as to cut off the main transmitted electron rays and the inelastic scattering electron rays at the objective aperture while allowing the diffractive scattering electron rays to enter into the magnifying lens through the objective aperture so as to form a dark field image having high contrast, whereby the focusing is made while observing the dark field image.
公开/授权文献
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